NDLI: Development of a micro-generator based on Bi thin films

Content Provider	IEEE Xplore Digital Library
Author	Miyazaki, K. Takashiri, M. Kurosaki, J.-i. Lenoir, B. Dauscher, A. Tsukamoto, H.
Copyright Year	2007
Description	Author affiliation: Dept. of Biol. Functions & Eng., Kyushu Inst. of Technol., Fukuoka (Miyazaki, K.; Takashiri, M.; Kurosaki, J.-i.)
Abstract	In this study, we fabricated in-plane thermoelectric micro-generators (4 mm times 4 mm) based on bismuth telluride thin films by using flash evaporation method. The thermoelectric properties of as-grown thin films are lower than those of bulk materials. Therefore the as-grown thin films were annealed in hydrogen at atmospheric pressure for 1 hour in a temperature range of 200 degC. to 400degC. By optimizing the annealing temperature, thin films with high thermoelectric power factors of 8.8 $muW/(cmldrK^{2})$ in n-type and 13.8 muW/(cmldr $K^{2})$ in p-type are obtained. To evaluate the figure of merit of the thin film, the thermal conductivity of the n-type thin film is measured by the 3omega method. The thin film annealed at 200degC exhibited a cross-plane thermal conductivity of 1.2 W/(mldrK). Micro-generators of flash-evaporated bismuth-telluride thin films are fabricated using three shadow masks. The shadow masks are prepared by standard micro-fabrication processes such as nitridation of Si, dry etching, and wet etching. Thermoelectric power of the as-grown thin film devices with 16 pairs of p-n legs are measured by YAG laser heating at the center of the devices. The maximum open circuit voltage is 6.7 mV under 2.5 K temperature difference.
Starting Page	294
Ending Page	299
File Size	845628
Page Count	6
File Format	PDF
ISBN	9781424422623
ISSN	10942734
DOI	10.1109/ICT.2007.4569482
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-03
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bismuth Transistors Thermoelectricity Thermal conductivity Annealing Hydrogen Temperature distribution Reactive power Conductivity measurement Dry etching
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Flash Evaporated Thin Films of Bismuth Telluride

Thermoelectric Micro-Cooler of Bismuth Telluride Thin Films

Thickness dependences of the thermoelectric properties of Bi thin films

Annealing effect on thermoelectric properties of Bi implanted Si thin film

Effects of annealing electrodeposited bismuth telluride films

Effects of substrate temperature on thermoelectric properties of amorphous Si/Ge thin films

New micro thermoelectric devices based on bismuth telluride-type thin solid films

Optimization of multicomponent thermoelectrics based on Bi in the range below and above room temperature

The Development of the Micro-Generator on the Substrate Based Thin Film

Development of a micro-generator based on Bi thin films

Similar Documents

Flash Evaporated Thin Films of Bismuth Telluride

Thermoelectric Micro-Cooler of Bismuth Telluride Thin Films

Thickness dependences of the thermoelectric properties of Bi thin films

Annealing effect on thermoelectric properties of Bi implanted Si thin film

Effects of annealing electrodeposited bismuth telluride films

Effects of substrate temperature on thermoelectric properties of amorphous Si/Ge thin films

New micro thermoelectric devices based on bismuth telluride-type thin solid films

Optimization of multicomponent thermoelectrics based on Bi in the range below and above room temperature

The Development of the Micro-Generator on the Substrate Based Thin Film

Development of a micro-generator based on Bi thin films