NDLI: Wide band study of silicon-on-insulator photodiodes on suspended micro-hotplates platforms

Content Provider	IEEE Xplore Digital Library
Author	Andre, N. Li, G. Gerard, P. Poncelet, O. Zeng, Y. Ali, S.Z. Udrea, F. Francis, L.A. Flandre, D.
Copyright Year	2015
Description	Author affiliation: Cambridge CMOS Sensors, Cambridge, UK (Ali, S.Z.; Udrea, F.) \|\| Inst. of Inf. & Commun. Technol., Electron. & Appl. Math., Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium (Andre, N.; Li, G.; Gerard, P.; Poncelet, O.; Francis, L.A.; Flandre, D.) \|\| Sch. of Phys. & Microelectron. Sci., Hunan Univ., Changsha, China (Zeng, Y.)
Abstract	In this paper, the performances of a lateral thin-film PIN photodiode based on silicon-on-insulator technology are reported for applications from blue to red wavelengths. The platform consists of a micro-hotplate with a suspended heater and a photodiode. Responsivities of 0.01 to 0.05 A/W were obtained for 450-900 nm light range in reverse bias operation. Suspended photodiodes give up to 5x responsivity improvement with regard to the photodiodes on substrate. In addition to photodetection, the diode can monitor the temperature with a linear voltage decreasing by about 1.4 mV/K, under 50 μA constant forward current for a large range of temperature (measured from 25 to 300°C).
Starting Page	1
Ending Page	4
File Size	1889712
Page Count	4
File Format	PDF
ISBN	9781479976690
DOI	10.1109/ICICDT.2015.7165879
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-06-01
Publisher Place	Belgium
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photodiodes Temperature sensors Temperature measurement Silicon Silicon-on-insulator Substrates CMOS technologies Semiconductor photodiode Lateral thin-film PIN diode Temperature sensor Silicon-on-Insulator Harsh environment
Content Type	Text
Resource Type	Article

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