NDLI: A study of L effects in a 40 nm SA-MSCFET

Content Provider	IEEE Xplore Digital Library
Author	Jyi-Tsong Lin Yi-Chuen Eng Shiang-Shi Kang
Copyright Year	2008
Description	Author affiliation: Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung (Jyi-Tsong Lin; Yi-Chuen Eng; Shiang-Shi Kang)
Abstract	This work aims to examine and analyze carefully the effects of block oxide length $(L_{BO})$ in a 40 nm multi-substrate-contact field-effect transistor (MSCFET). In addition, the proposed structure is based on the self-aligned (SA) gate-to-body technique. In the MSCFET design the two key parameters are the length and the height of the block oxide which are so sensitive to the short-channel effects (SCEs). Because the research of the block oxide height $(H_{BO})$ has already been done as described in [1], in this study we will focus on the influence of $L_{BO}$ on the SA-MSCFET. Also, some preliminary characteristics of the new configuration developed are demonstrated by using TCAD simulations.
Starting Page	67
Ending Page	70
File Size	848556
Page Count	4
File Format	PDF
ISBN	9781424418107
DOI	10.1109/ICICDT.2008.4567248
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-02
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	CMOS technology FETs Etching Insulation Silicon on insulator technology Numerical simulation Boron Epitaxial growth Substrates Sputtering block oxide height (HBO) block oxide length (LBO) multi-substrate-contact field-effect transistor (MSCFET) self-aligned (SA) short-channel effects (SCEs)
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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