NDLI: A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Content Provider	IEEE Xplore Digital Library
Author	de Graaf, G. Huai-Wen Wu Wolffenbuttel, R.F.
Copyright Year	2011
Description	Author affiliation: Delft University of Technology, EWI, DIMES, Mekelweg 4, 2628 CD, The Netherlands (de Graaf, G.; Huai-Wen Wu; Wolffenbuttel, R.F.)
Abstract	In this work an analytical model for static and dynamic thermal analysis of heated thin bridges, membranes or cantilevers is presented. The analysis includes the thermal conductivity of the surrounding gas, which cannot be neglected in most MEMS devices. The model is based on Laplace transformation of the heat equations and on the Thermal Quadrupole Method. A one-dimensional approximation using these methods results in practical sets of equations that can be roughly evaluated by hand for feasibility studies of a design. Further evaluation can be done by some basic matrix operations, e.g. analytically by Mathematica or numerically using MATLAB. Plots of these functions can provide the designer with insight on the thermal behavior of the structure, without the use of finite element calculations.
File Size	1539429
File Format	PDF
ISBN	9781457701078
e-ISBN	9781457701061
DOI	10.1109/ESIME.2011.5765809
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-04-18
Publisher Place	Austria
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Heating Analytical models Silicon Gas detectors Thermal sensors Arrays Optimization MEMS thermal modeling Thermal Quadrupole Method Beam Thermal Analysis Thermal Conductivity Gas sensor Thermal conductivity measurement
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in