NDLI: Two dimensional, high electromechanical coupling aluminium nitride Lamb wave resonators

Content Provider	IEEE Xplore Digital Library
Author	Loke, S.P.H. Chengliang Sun Yao Zhu Nan Wang Gu, Y.A.
Copyright Year	2015
Description	Author affiliation: Inst. of Microelectron., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore (Loke, S.P.H.; Chengliang Sun; Yao Zhu; Nan Wang; Gu, Y.A.)
Abstract	Novel checker-patterned AlN piezoelectric Lamb wave resonators with applications in radio-frequency microelectromechanical systems (RF MEMS) are reported in this paper. In this work, diamond shaped electrodes are arranged on a plate of AlN in a checkered formation. When out-of-phase alternating currents are applied to adjacent checkers, acoustic Lamb waves are excited in the piezoelectric layer in two directions, achieving electromechanical coupling coefficients comparable FBARs. The simulated resonator presented in this paper resonates at 2.34GHz and achieves electromechanical coupling coefficients of 5.8%. By varying the electrode dimensions and inter-electrode distancing, several resonators of differing frequencies can be fabricated on a single wafer, allowing this device to provide novel solutions in broadband filters, duplexers and multiplexers. To verify this concept, a filter with bandwidth of 102 MHz at the center frequency of 2.4 GHz based on Checker-mode resonators are simulated in this work.
Starting Page	733
Ending Page	735
File Size	624585
Page Count	3
File Format	PDF
ISBN	9781479983629
e-ISBN	9781479983643
DOI	10.1109/EDSSC.2015.7285221
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-06-01
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Conferences Electron devices Solid state circuits RF MEMS Acoustic resonators Lamb wave acoustic devices checker-mode resonators bandpass filters
Content Type	Text
Resource Type	Article

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