NDLI: Preparation of micro fluidic chip based on SU-8 mold

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2015 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC)

2013 IEEE International Conference of Electron Devices and Solid-state Circuits

2012 IEEE International Conference on Electron Devices and Solid State Circuit (EDSSC)

2011 IEEE International Conference of Electron Devices and Solid-State Circuits

EDSSC-2011 committee

Table of contents

Vertical integration of light-emitting diode chips

60GHz direct conversion CMOS transceiver design

Compact modeling of interconnect reliability

Contamination assessment of inductive couple plasma etching chamber under mixture of recipes using statistical method

A two-dimensional short-channel model for threshold voltage of tri-gate (TG) MOSFETs with localized trapped charges

ESD-aware circuit design in CMOS integrated circuits to meet system-level ESD specification in microelectronic systems

Modeling of advanced memories

A 14-bit 200-MS/s time-interleaved ADC calibrated with LMS-FIR and interpolation filter

A fully integrated 0.18 µm SiGe BiCMOS low power 60 GHz receiver & transmitter for high data rate wireless communications

Nanoscale silicon ion-sensitive field-effect transistors for pH sensor and biosensor applications

Whole chip ESD protection for 2.4 GHz LNA

A low power constant-Gm rail-to-rail operational transconductance amplifier by recycling current

The effect of bandgap engineering on I fly-back characteristic of power SiGe heterojunction bipolar transistor

The hot-carrier degradation mechanism of p-DDDMOS transistor with different p-drift dosage

Adjustable gamma correction reference voltage source for LCoS

A novel parallel random number generator for wireless medical security applications

Black's equation for today's ULSI interconnect Electromigration reliability — A revisit

Analysis and simulation of inverter employing SiC Schottky diode

A novel surface potential-based mobility degradation model of thin-oxide-MOSFET for circuit simulation

Analysis and architecture design of block matching in BM3D image denoising

MEMS thermal mass flow meter with double-heater structure

A compact threshold voltage model for the novel high-speed semiconductor device IMOS

Design and fabrication of TaN bottom electrode thermal sensing resistor for MEMs based bolometer application

A 65nm 1.2V 16-bit audio codec sigma-delta ADC in 2-2 MASH architecture with temperature-compensated biasing

Studies on I-V performance enhancements of ZnO thin film transistors by vacuum treatments below 300°C

a DC-DC boost converter based on SiC MOSFET and SiC SBD

An optical receiver with automatic gain control for radio-over-fiber system

A simplified VBIC model and SDD implementation for InP DHBT

The effects of gamma irradiation on GaAs HBT

A design of the frequency synthesizer for DRM/DAB/AM/FM application in 0.18 µm RF CMOS process

A 65nm CMOS low power delay line based temperature sensor

A low voltage 8.4 ppm/°C voltage reference based on subthreshold MOSFETs

A high speed wide band low phase noise multi-mode frequency divider for DRM/DAB/AM/FM frequency synthesizer

Nano-powder-magnetic-core vertically stacked-spiral RF inductor in CMOS

The verification of network processor Fast Bus Interface using SystemVerilog

Core-shell type of tunneling nanowire FETs for large driving current with unipolarity

A novel compact isolated structure for 600V Gate Drive IC

A circuit of configurable skin tone adjusting method base on exact skin color region detection

Effects of non-uniform grains distribution of the intrinsic n-channel polycrystalline silicon TFTs

A self-adaptive synchronizing algorithm for UHF RFID tag

System-level design of 60GHz front-end for Gbps high speed wireless communication

Preparation of micro fluidic chip based on SU-8 mold

A new type of 4H-SiC epitaxial channel IEMOSFET

Design and simulation of THz filters embedded in LTCC multi-layer substrate

Crystallization study for MgO in magnetic tunnel junction structure

DC characteristics of large gate periphery InAlN/GaN HEMT on sapphire substrate

Effect of ICP etching on InP-based multiple quantum wells microring lasers

Skyworks capacitor model for ESD applications

A 65nm 1.2V 16-bit audio codec sigma-delta DAC with headphone driver

Design and implementation of a modified high performance and low power CIC interpolation filter

An audio cascaded ΣΔ modulator using gain-boost class-C inverter

AlGaN-based solar-blind metal-semiconductor-metal photodetectors

Pulsed laser investigation in a DC-DC Controller

The influence of the input capacitor on the ESD behavior

Low power high data rate GHz range receiver in 40nm CMOS technology

Low voltage, low power, downconversion folded-switching mixer with current-reuse technology

Low-voltage indium-zinc-oxide thin film transistors gated by solution-processed chitosan-based proton conductors

A 100MHz — 2GHz wireless receiver in 40-nm CMOS for software-defined radio

A 10GHz 2.8dB gain passive mixer in 0.18um CMOS technology

A low flicker noise and high IIP2 downconversion mixer for Zero-IF GSM receiver

A 17.5dBm IIP3 high linear fully differential RF CMOS amplifier

Investigation of InGaP/InGaAs pseudomorphic triple doped-channel field-effect transistors

A hardware efficient implementation of chroma interpolator for H.264 encoders

Comparison of multiple-polysilicon-nanowire pH-sensors coated with different ALD-deposited high-k dielectric materials

A novel low complexity soft-decision demapper for QPSK 8PSK demodulation of DVB-S2 systems

New upper bound of target array for reconfigurable VLSI arrays

Dc characteristics of proton radiated SiGe power HBTs at cryogenic temperature

Label-free protein chip and its detection system realization

Clock swing enhanced charge pump

A 24GHz low phase noise feedback CMOS LC-VCO

Effects of different Ar/O ratios on the electrical properties of CuPc-based TFTs with ZrO gate dielectric

A low-power low-phase-noise wide-tuning-range 60-GHz voltage-controlled oscillator in 0.18-µm CMOS

Impact of stress on band-to-band tunneling current in SOI MOSFET based on first-principles calculation

Ultra-wide band microwave image reconstruction for early breast cancer detection by double constrained robust capon beamforming

Simulation of dual-stage charge management circuit used in stand-alone photovoltaic (PV) systems

Finite element analysis of harmonic frequency for 2.4GHz SAW tags

Design of SiGe HBT UWB low noise amplifier employing broadband noise canceling

Frequency compensation scheme for LDO regulator operated under wide power supply range in smart battery system

A Drain-Extended AlGaN/GaN MISFET for unidirectional switch

Degradation effects of gate oxide and STI charge in SOI LDMOS

A novel structure of high voltage SOI device with Composite Dielectric buried layer

Breakdown voltage enhancement for power AlGaN/GaN HEMTs with Air-bridge Field Plate

Multilevel resistive switching characteristics in Ag/SiO/Pt RRAM devices

A high-PAE high-gain 24-GHz fully integrated 0.18-µm CMOS power amplifier using micromachined inductors

3D Monte Carlo simulation of Gate-All-Around Germanium nMOSFET

Analysis of noise of current accumulator in Time-Delay-Integration CMOS image sensor

Effects of nitrogen implant on ultra-thin gate dielectric breakdown

Evaluation of quasi-ballistic transport in nano-MOSFETs by deterministic solver of the time dependent multi-subbands Boltzmann Transport Equation

A System-On-Chip bus architecture for hardware Trojan protection in security chips

SCR device with high holding current for on-chip ESD protection

Lag free transfer transistor in CMOS image sensor pixel with a non-uniform doped gate

Double Enhance Dielectric Layer Electric Field high voltage SOI LDMOS

3D modeling of CMOS image sensor: From process to opto-electronic response

A novel flash memory cell and design optimization for high density and low power application

Verilog-A modeling and design of a micromachined capacitive accelerometer

A high protection voltage dual-gate GaN HEMT clamp for electric vehicle application

Design based on two-frame composition for high dynamic range CMOS image sensor

A 50MS/s 80dB SFDR digital calibrated pipelined ADC with workload-balanced MDAC

Novel single-loop sigma-delta modulator with extended dynamic range

A high-Psat high-PAE fully-integrated 5.8-GHz power amplifier in 0.18-µm CMOS

Reliability analysis of weak signal detection based on Duffing oscillator

Investigation and optimization of low-power techniques in X-band CMOS LC-VCO design

Engineering buried oxide in dopant-segregated Schottky barrier SOI MOSFET for low-variability nanoscale CMOS circuits

A curvature-compensation bandgap voltage reference with programmable trimming technique

High performance ZnO TFTs for ultraviolet image sensors

A novel dynamic element matching technique in current-steering DAC

Cap-sharing technique to reduce on chip capacitance in semi-digital phase lock loops

Measurement of the anisotropy fields for AMR sensors

High performance reactive sputtering deposited ZnO thin-film transistors on transparent substrate

A radiation hardened SRAM cell design in PD-SOI CMOS technology

Low power eeprom designed for sensor interface circuit

Si: HfO dual-k spacer dopant-segregated Schottky barrier SOI MOSFET for low-power applications

A deadlock-free fault-tolerant routing algorithm for N-dimesional meshes

Improving the electrical properties of lanthanum oxide gate dielectric film by using nitrogen and aluminum doping

An On-Chip Bus modeling and parameter simulation method based on utilization analysis

Quasi-ballisticity of the electron transport in a 16nm silicon double-gate nMOSFET

Effects of HfO trapping layer in Gd nanocrystal nonvolatile memory with multi-tunneling layers

Design of dual band SiGe HBT LNA with current reuse topology

An optical receiver with automatic gain control circuit for 4G RoF technology

Unipolar CMOS inverter based on punch-through effect with two embedded oxide structure

Nano-scale leakage characterizations of the γ-APTES/ silica nanoparticles bionanocomposite

A qualitative comparison study of analog performance of junction and junctionless poly-Si TFTs

A low power high speed readout circuit for 320×320 IRFPA

An extensible drive system for AM-OLED panel

FPGA verification methodology for SiSoC based SoC design

An improved 512 bit EEPROM IP for RFID tag IC

A 100-MHz — 5.0-GHz active balun using 0.18-µm CMOS process

A Yagi antenna array for 60-GHz WPAN

A low-noise HV interface circuit for MEMS vibratory gyroscope

A novel on-chip CMOS current sensor implemented by switched capacitors for a current-mode control DC-DC buck converter

A 3.1–10.6 GHz ultra-wideband 0.18-µm CMOS low-noise amplifier with micromachined inductors

UV-A selective photo-responsivity in a GaN MSM photodetector using ITO schottky electrodes

Programmable readout circuit for capacitive accelerometer

Vertical GaN schottky barrier diode on an N-face GaN layer formed by ELOG and laser-lift-off technique for high-power application

Capacitor mismatch auto-compensation for MEMS gyroscope differential capacitive sensing circuit

A small-area low-mismatch multi-channel constant current LED driver

A novel low-power high-date-rate BPSK demodulator

A fractional-N synthesizer for multi-mode positioning system with constant loop bandwidth

A 16-bit, 250ksps successive approximation register ADC based on the charge-redistribution technique

An 1.2 V 8-bit 1-MS/s single-input res-cap segment SAR ADC for temperature sensor in LTE

Noise analysis of the CG-CS low noise transconductance amplifier

A digital dither controlled step-up/step-down DC-DC converter with smooth transition

Dynamically self-adaptive load current maximization technique for maximum power point tracking in photovoltaic arrays

A high-linearity fully-differential mixer

A novel low-power low-complexity chip solution for tunable UWB transmitter in CMOS 0.18µm technology

A low-power and low-complexity chopper-stabilized amplifier

Fabrication of SiC p-i-n betavoltaic cell with $^{63}Ni$ irradiation source

Channel current enhancement by back-gate biasing in ultrathin SOI-MOSFETs with thin BOX

Design of a hysteresis lock detector for dual-loops clock and data recovery circuit

A CMOS bandgap reference with high PSRR and improved temperature stability for system-on-chip applications

A low power cryogenic CMOS ROIC for 512×512 infrared focal plane array

A CMOS low-power receiving signal strength indicator using weak-inversion limiting amplifiers

A CMOS power amplifier using power combination for 3.5GHz mobile WiMAX subscriber applications

A low power 17% tuning range low phase noise VCOs using coupled LC tanks

A delta-sigma fractional-N frequency divider for a Phase Lock Loop in 60GHz transceiver

A 14-bit 200-MS/s time-interleaved ADC calibrated with LMS-FIR and interpolation filter

Design of configurable LFSR instructions targeted at stream cipher processing

Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization

Design and verification of SOC2008 processor based on SPARC V8 architecture for space applications

Novel pipelined interpolator for low-complexity chase soft-decision Reed-Solomon decoder

A compact 60 GHz LTCC microstrip bandpass filter with controllable transmission zeros

Research and implementation of micro-architecture for Elliptic Curve Cryptography processor

Monte Carlo analysis of a 2nd-order curvature-compensated CMOS bandgap voltage reference

Study on transport characteristics of CNTFET based on NEGF theory

A design and realization of FPGA-based IMU data acquisition system

Effects of fluorine incorporation on the electrical properties of silicon MOS capacitor with La gate dielectric

Design and implementation of a NAND Flash controller in SoC

A BiCMOS implementation of noise canceling low noise amplifier for wideband applications

2010 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC)

2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC)

2008 IEEE International Conference on Electron Devices and Solid-State Circuits

2007 IEEE Conference on Electron Devices and Solid-State Circuits

2005 IEEE Conference on Electron Devices and Solid-State Circuits

2003 IEEE Conference on Electron Devices and Solid-State Circuits (IEEE Cat. No.03TH8668)

Preparation of micro fluidic chip based on SU-8 mold

Content Provider	IEEE Xplore Digital Library
Author	Yuan-Qing Wu Su-Ying Yao
Copyright Year	2011
Description	Author affiliation: School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China (Yuan-Qing Wu; Su-Ying Yao)
Abstract	As the silicon mold has rough edges, microchip is not conducive to fluid movement. In this paper, mold was produced by SU-8, and a set of production process was given. Then this paper made anti-stick layer on the mold, in order to improve mold re-use rate. Author discussed the impact of curing temperature and the ratio of PDMS and curing agent on the device, and does modification on casting PDMS, then seal to complete the microarray.
Starting Page	1
Ending Page	2
File Size	198471
Page Count	2
File Format	PDF
ISBN	9781457719981
e-ISBN	9781457719974
e-ISBN	9781457719967
DOI	10.1109/EDSSC.2011.6117676
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-11-17
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Curing Microfluidics Surface treatment Polymers Silicon Fluidic microsystems PDMS SU-8 micro fluidics
Content Type	Text
Resource Type	Article

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