NDLI: Design and test of MEMS

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Design and test of MEMS

Content Provider	IEEE Xplore Digital Library
Author	Courtois, B. Karam, J.M. Mir, S. Lubaszewski, M. Szekely, V. Rencz, M. Hofmann, K. Glesner, M.
Copyright Year	1999
Description	Author affiliation: TIMA Lab., Grenoble, France (Courtois, B.)
Abstract	This paper deals with design, simulation and test of MEMS (microelectromechanical systems). Both existing tools and open research areas are addressed. An appropriate Computer-Aided Design (CAD) environment is presented. Similarities between the present development of MEMS and the development of microelectronics decades ago are pointed out, including the migration from point tools to CAD frameworks, testing and intellectual property (IP) issues.
Starting Page	270
Ending Page	275
File Size	226248
Page Count	6
File Format	PDF
ISBN	0769500137
ISSN	10639667
DOI	10.1109/ICVD.1999.745160
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-01-07
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Design automation Productivity Microelectronics System testing Circuit testing Rivers Mechanical systems Read only memory Microelectromechanical systems
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering Hardware and Architecture

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