NDLI: Testing requirements for microelectromechanical systems (MEMS)

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Testing requirements for microelectromechanical systems (MEMS)

Content Provider	IEEE Xplore Digital Library
Author	Salmon, L.G.
Copyright Year	1998
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Brigham Young Univ., Provo, UT, USA (Salmon, L.G.)
Abstract	This presentation addresses some of these challenges and outlines potential approaches to overcoming them. Examples of the many energy domains encountered in MEMS devices will be provided and potential strategies for evaluating MEMS device performance in these domains will be discussed. Particular attention will be paid to the challenges of measuring performance of these devices in an extensively integrated MEMS device. High-volume fabrication of MEMS devices based on lithographic methods leads to large data sets and generally predictable, but extensive, variations in fabricated tolerances. Potential methods of addressing these challenges will be described and compared with similar approaches used in integrated circuit testing. The small size of MEMS devices also poses challenges for tests that are influenced by material parameters that are not well understood at the micron scale. Interfaces and surfaces that are a relatively unimportant at the scale of macro-devices can dominate performance of MEMS devices. In addition, critical material variations (crystalline structure, strength, etc.) that can be integrated over large volumes in macro-applications must be treated exactly for many MEMS devices. The influence of these challenges on testing of MEMS devices will be discussed and approaches to address these challenges are described.
File Size	106591
File Format	PDF
ISBN	0780344200
ISSN	10887725
DOI	10.1109/AUTEST.1998.713436
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-08-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	System testing Microelectromechanical systems Micromechanical devices Microelectromechanical devices Crystalline materials Particle measurements Fabrication Integrated circuit testing Circuit testing Materials testing
Content Type	Text
Resource Type	Article

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