NDLI: An integrated plasma equipment - feature scale model for the Bosch deep Si etch process

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IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255)

The radiation magnetohydrodynamics of a nanosecond capillary discharge

Recent advances in conductivity and EOS modeling for high energy density physics simulations near the metal-insulator transition

Implosions of wire arrays with mixed materials and wire diameters

Three-dimensional modelling of the implosion phase of wire array Z pinches

Homogeneous electrical explosion of refractory metal wires in a vacuum

Surface plasma evolution from mockup Z current-return structures on Gamble II

Explosive pulsed electric power generation

Calculating stator losses in a helical MFCG

Preliminary simulations and electromagnetic field analysis of a helical flux compression generator

Surface fracturing of armatures within helical flux-compression generators

Thermodynamic state of the magnetic flux compression generator volume

High speed optical diagnostics of an exploding wire fuse for power conditioning of explosive flux compression generators

Experimental and numerical investigation of the armature/stator contact in magnetic flux compression generators

Explosive-driven pulsed-power generation (MURI) program 2D numerical simulation of helical generators

Effect of trapped ions on shielding of a charged spherical object in a plasma

Low Mach number shock wave induced modulation of plasma conductivity

Interaction of the pulsed aluminum wire plasma with the polyethylene wall

Fast electron effects in helicon discharges

Modeling of a helicon plasma source

Enhancement of high-charge-state ions in vacuum arc ion sources

Ion-ion plasmas from discharges based on electron beam ionization

Production of sheet electron beams with crossed-field secondary emission diodes

Exact results for ionization of a model atom

Miniaturised vacuum technologies: do they have a future for terahertz frequency devices?

Resonant tunneling of electrons in a crossed-field nanogap

Carbon nanotube-based cathodes for microwave tubes

Terahertz-regime, micro-VEDs: evaluation of micromachined TWT conceptual designs

Development of high efficiency backward wave oscillators for submillimeter applications

Confined flow multiple beam guns for high power RF applications

Multi-phase AC plasma generators

Features of electric discharge in gas of high density

Structure of localized plasma produced by pulsed discharges in pressurized superfluid liquid helium

Collective phenomena at the metal-plasma interface

Discharge in humid air, rotating plasma and the problem of ball lightning

Helimac a device for plasma turbulence investigations

A novel technique to move a dust plasma plume

Investigation of the characteristics of atmospheric laser induced plasmas

Thermodynamic properties and transport coefficients of high-temperature air plasma

A study of M=0 and M=1 helicon wave generation in a weakly magnetized inductively coupled plasma

The resistive barrier discharge (RBD)

The characteristics of the starting potential of barrier discharge

Preliminary results of the research on one atmosphere glow discharge

Hollow-cathode electron source with a fast gas-puff valve

Operation of ferroelectric cathode with control grid

Development of a durable, large area cathode for repetitive, uniform electron beam generation

Improvement of the spatial current density distribution of intense pulsed electron beams

High-current low-energy plasma electron sources

CW cathode development for LAPPS

Gaseous ion and plasma sources based on glow discharge with electron injection

Further development of plasma electron gun for operation at forepump gas pressure

Edge effect studies of a large area cathode for the Electra KrF laser

Fundamental characteristics of pulse-operated helium inductively coupled plasma

Experimental investigation of mini-microwave plasma sources

Compact electron cyclotron resonance ion source for calibration of space plasma instrumentation

Multipoint explosive emission cathode operation in external magnetic field

High-voltage microsecond pulse generator for plasma immersion ion implantation

Study and diagnostics of the effect of emissive current variations in segmented electrode Hall thruster

High-gradient accelerator based on a superlight source of radiation

Vircator operation with plasma assistance

Modeling plasma immersion ion implantation under trapezoidal voltage pulses

Effect of magnetic field distribution in cylindrical Hall current plasma sources

Characteristics of the nitrogen ion beam produced in a plasma focus device

Study on the gas shell from gas puff nozzle for z-pinch

2D RMHD simulation study of nested wire array Z-pinch with foam target

Simulation of quasi-spherical shell implosions on Z for inertial confinement fusion

Experiments with the nanosecond plasma-flow-switch output device on the S-300 pulsed power generator

On energy transformation mechanisms in dense turbulent plasma on radiating intense Z-pinches

Study of possibility of soft X-ray radiation generation at the experiments with magnetocumulative generators

Formation of a highly ionized plasma in a capillary discharge with a programmed pulse of input power

Azimuthal self-pressed gas discharge with trapped longitudinal magnetic flow

Magnetic diffusion effects on electrically driven flux compression schemes

Spectroscopic and energetic characterization of capillary discharge plasmas devoted to EUV production for new lithography generation

"Point" X-ray source engendered by hot spots in a high-current discharge

Factors affecting the pulse width of capillary discharge soft X-ray laser

Z-pinch radial behavior using 1D visible and X-ray streak measurements on the Z-accelerator

Electrical wire explosion in longitudinal magnetic field

X-ray spectropolarimetry of high-current x-pinch plasmas

Polarity effect on the behavior of gas puff z-pinch plasma produced by IPP system

Low repetitive DPF neutron source and its visible spectra observation

The role of Rayleigh-Taylor instability in the energy deposition to Z-pinch plasma

Ar-H/sub 2/ double gas puff experiments on the GIT-12 generator

Axial particle and soft X-ray emission from the fast capillary discharge

Non fluid features in z pinch implosions

Multi-dimensional z-pinch calculations with ALEGRA

X-pinch dynamics: experiment and simulation

Time-resolved spectroscopic investigations of soft X-ray radiation from X pinches

SNL-Z wire-array initiation experiments at NTF

Optical observation of the instability in microsecond gas-puff z-pinch plasmas

Development of X-ray facility Baikal based on 900 MJ inductive store and related problems

Study of moderate-Z pinch performance relevant to high current drivers

Spectral output of Z-machine implosions

Equation of state and electron transport effects in exploding wire evolution

Radiation hydrodynamics simulations of low-z foams heated by z-pinch radiation

Fiber optic diagnostics for Z-experiments

Dynamics of micropinches in exploding wire and vacuum spark plasmas

Efficient K-shell emission in a Z pinch with axial magnetic field

Spectral analyses of long-implosion-time Al:Mg alloy nested wire array implosions on the Saturn generator

Effect of resistivity on dynamics of the wire arrays

The initiation of electrical explosion of fine metal wires

Density and temperature profile formation in long risetime Saturn, aluminum, single array implosions

Optical and X-ray observations of multi-wire z-pinch experiments

Unstable behavior in wire array discharges and effect of wire shape

Exploring the formation and evolution of the plasma radiation from exploding single wires

Application of Milne condition diffusive radiation transport in Mach2 to wire implosions on Saturn

Desorption of hydrogen from rapidly heated metal foils and wires

Effect of discrete wires on the implosion dynamics of wire arrays

Cumulation of laser induced magnetic field by a Z pinch device

Modeling of a shell-on-shell nozzle and comparison with laser induced fluorescence and interferometry measurements

Nanosecond X-radiation pulse generation in long implosion systems with hollow cathode

Magnetic diffusion in conductors at ultrahigh current density

A pulse transformer for plasma immersion ion implantation applications

Numerical simulation of electromagnetic pulse formation processes of EMIR complex

High current pulse striplines

Modelling and transmission-line calculations of the final superconducting dipole and quadrupole chains of Cern's LHC collider: methods and results

High power density, high frequency, and high voltage pulse transformer

Use of Hamiltonian relativistic principle of least action (HRPLA) to improve the computation of magnetic self-insulation in pulsed vacuum transmission lines (MITL's)

Impact of helix geometry on MCG flux losses

Improved modeling of electrically exploded fuse opening switches in flux compression generator experiments

Pulsed radiography of low-density objects in the conditions of explosive experiments

Study of fast compact helical MCG

Disk magnetocumulative generator for EMIR facility

Helical magnetocumulative generator with compact transformer

Experiments on cumulative jets current destruction

Reproduction of current pulse of lightning discharge of positive lightning with amplitude of 90 kA on lightning rod using MCG based power source

Methods of parameters diagnostics of multifunctional electrophysical explosive complex "EMIR"

Investigation results of liner dispersion in conical generator

Calculation of air temperature and pressure history during the operation of a magnetic flux compression generator

Explosive magnetic generator of high-power voltage pulses of 1 MV amplitude and 0.3 microsecond duration

Logics of selection of the main parameters of a helical EMG of megaampere class

2-D calculations of helical explosive magnetic generator using vector potential

Effects of defects on armatures within helical flux-compression generators

Reduction of the extreme conditions of MAGO chamber operation by changing the shape of current pulse of plasma magnetization

Experimental study of compact explosive-driven shock wave ferroelectric generators

Explosive-driven moving magnet generators

The charging and integrating modes of pulsed power generation in moving magnet systems

Results of testing of a small class (diameter 250 mm) disk EMG

Film protection in the radiographic experiments studying the liner compressed by magnetic field from disk EMG with HE mass of /spl sim/100 kg

Simple economic explosive magnetic generator of high pulsed power

Comparison of the results of a semi-empirical MCG model for helical generators to experimental results

Semi-empirical model for helical magnetocumulative generators

Explosive driven ferroelectric generators

Parametric and experimental investigation of the EDFEG

Multi-stage flux-trapping helical flux compression generators

About prospects of application of the fly wheel stabilizer of frequency in a power system

The MICHELLE electron gun and collector modeling tool

An affordable three dimensional self-consistent multi-fluid model for low temperature plasmas

Modeling of electron beam interactions in structures with re-entrant cavities

User-friendly, economical, 3D charged particle code with adaptive meshing

A 3-d electrostatic DSMC/PIC model on unstructured grids and applications to plasma microflows

Advanced design of quasi-optical launchers using a surface integral formulation

Simulation of parameters of the stationary facility "ATLAS" by means of disk EMG

Experimental study of conical liner magnetic implosion

Experimental study of Rayleigh Taylor instability by means of magnetic implosion

Five to 10 MA experiments using flat plate explosive generators

Output characteristics of explosively-driven ferromagnetic generators

Compact explosive-driven shock wave ferromagnetic generators

Advanced modeling of an exploding flux compression generator using lumped element models of magnetic diffusion

Fireset applications of improved longevity optically activated GaAs photoconductive semiconductor switches

Semiconductor lasers from photoconductive switch filaments

Ultra-fast UV-triggered high voltage diamond switch

Multi-kilovolt solid-state picosecond switch studies

Sub-nanosecond avalanche transistor drivers for low impedance pulsed power applications

Starting mechanisms for high pressure metal halide lamps

Arc spot formation on cold cathodes in high intensity discharge lamps

Winkout in HID discharges

Electrical breakdown voltage in a mixed gas in connection with application to plasma display panel

A Monte Carlo simulation of radiation trapping in electrodeless gas discharges having complex geometries

Self-consistent particle-in-cell simulation of positive column discharge including radiation transport

Intense excimer emission from pulsed microhollow cathode discharges

Influence of magnetic fields on shaped-charge performance

Concept of a 50 MW/650 MJ power source based on industry-established MDS flywheel units

Topologies for compact compensated pulsed alternators

MHD pulsed power generation and applications

Development of 2.4 MJ capacitor bank for electro thermal propulsion technology

Development of antenna-source system for high-power electromagnetic pulse generation

Industrial-scale electroporation of plant material using high repetition rate marx generators

Nanosecond pulsed electric field (nsPEF) application effects on human cells: intracellular membrane disruption and apoptosis induction

Environmentally friendly pulsed power applications for industrial processes

Laser and microwave induced breakdown spectroscopy: basis for a new detection technique for chemical and biological agents

Biological weapons agent defeat using directed microwave energy

Time-dependent traveling wave tube model for intersymbol interference investigations

Three-dimensional, time-dependent simulation of coupled-cavity TWTs

Finite bandwidth and space charge effects in the MUSE model

Cold-test, large signal simulator: a conformal-mesh electromagnetic field solver

3D TWT modeling and experimental validation

An examination of the performance of backward wave CFA's and magnetron's in simulation and experiment

Progress in the pasotron theory and experiments

The Electra laser program

Large area, high reliability liquid dielectric systems: provisional design criteria and experimental approaches to more realistic projections

High repetition rate charging a Marx type generator

Repetitive high power pulser for continuous corona application

Repetitively-pulsed DC glow discharge in atmospheric pressure air: modeling and experiments with a 12 kV, 10 Ns, 100 kHz pulse generator

A 1 megawatt polyphase boost converter-modulator for klystron pulse application

Use of megagauss fields for solid state physics investigations "Kapitsa" series in Sarov

Syrinx project: compact pulse-current generators devoted to material study under isentropic compression loading

Dynamic deformation of a solenoid wire due to internal magnetic pressure

Crack tip behavior under pulsed electro-magnetic loading

Conductivity measurements of MFCG armature material under shock and high strain rates utilizing a split-Hopkinson pressure bar apparatus

Ball lightning explained as a stable plasma toroid

Micro ball lightning obtained during underwater spark discharges, compared with natural ones

Microwave discharges - structure and dynamic

Adding OpenMP to an existing MPI code: will it be beneficial?

Adaptive node techniques for short pulse electromagnetic modeling

Recent progress in computational plasma physics research with the MAGIC electromagnetic-PIC simulation tool

A finite volume differencing scheme that exactly preserves div(b)=0 on a quadrilateral mesh

Particle tracking on unstructured grids

Dynamic load-balancing for a parallel electromagnetic particle-in-cell code

One-dimensional PIC simulation of ultrashort laser pulse amplification in a plasma by a counterpropagating pump

Three-dimensional fluid simulation of PDP cell

A digital filtering scheme for particle codes in curvilinear coordinates

Octagonal lattices in thermal lattice Boltzmann & MHD simulations

Reduced modeling of MHD instabilities

Simulation of ultrahigh intensity laser pulses

Self-consistent modeling of low pressure microwave discharges including non-collisional heating processes

Optimization of treatment conditions for industrial gears in plasma immersion ion implantation (PIII) using particle-in-cell (PIC) simulation

RBF neural net for the AIRIX HV generators diagnosis

The development of a transient magnetic field measurement technique for implementation on a fuselage-like test setup

An electromagnetic fast shutter system for debris mitigation on Z

Fiber optic oscilloscope probe

An ultrafast probe for high-voltage pulsed measurements

A new technique for troubleshooting large capacitive energy storage banks

A compact square wave 15 kJ generator: <15 ns rise-time; 7.5 ohms load impedance; and, pulse width 100-500 ns

Measurement of the deuterium liner characteristics in the inverse z-pinch configuration

Dependence on axial magnetic field of the radiation from a high power gas-filled backward wave oscillator

A time-domain 1D Kirchhoff-PIC code for coupled-cavity traveling wave tubes

Characteristics of modulated field emission in helix TWT

1.5 octave wideband traveling-wave tube with heavily-loaded helical slow-wave structure

Helix traveling wave tube simulation

Investigation of ultrawideband pulses in wideband helix traveling wave tubes: Theory and simulation

Investigations of non-linear spectral behavior in multi-toned helix traveling wave tubes

LINC transmission using traveling wave tubes

Initial experimental investigations of intermodulation in a klystron amplifier

Intermodulation in klystrons and TWTs

An investigation of beam loading in a cavity

Analysis of cavity excitation driven by a modulated electron beam in Klystrode

Spectroscopic measurements of spherically convergent beam fusion

Fundamental study of radially convergent beam fusion

Equilibrium theory of an electron spiral torus in a neutral background gas

Model of airplane-associated ball lightning in the atmosphere based on concepts of electric reconnection and critical ionization velocity

High power semiconductor switches in the 12 kV, 50 kA pulse generator of the SPS beam dump system

Gate drive for high-speed high-power I.G.B.T.s

High voltage, high current, high dI/dt solid state switch

Evaluation of MOSFETs and IGBTs for pulsed power applications

Press-pack IGBTs, semiconductor switches for pulse power

Integrated 30 kV solid-state switch for pulse power applications

Solid-state modulator R+D for JLC

Effect of radial energy transfer on characteristics of plasma torch with water-stabilized arc

Experimental and theoretical determination of the transient radiation characteristics of a high power water vortex stabilized argon arc lamp

Numerical analysis on effects of various cathode and nozzle geometries on plasma characteristics of transferred arc torches for waste treatment

Comparative determination of actual thermal plasma characteristics by modeling and measurements for a nontransferred plasma torch with hollow electrodes

Optimal design of inductively coupled plasma torch using parametric study and design sensitivity analysis

Electrodeless microwave plasma-torch at atmospheric pressure

Atomic UV emission temperature profiles in an air microwave plasma torch

Microwave driven torches for high temperature chemistry and production of atomic species

Evolution of a copper vapour plasma obtained by laser ablation in a gas at atmospheric pressure

Comparison of experiments on plasma rotation in counter-rotating and divergent plasma centrifuges for isotope separation

Developments of pulse power industrial applications at the institute of pulse research and engineering (IPRE)

Equipment developed at IPRE for well stimulation in the process of oil and water production

Investigation of anode and cathode jets influence on electric arc properties with current up to 500 kA

Plasma conditions in a moly-oxide electrodeless bulb discharge

Pressure dependence of XeCl excimer plasmas excited by microwaves

Low pressure microwave plasma UV lamp for water purification and ozone production

Study of discharge characteristics of a color PDP cell using ramp type setup voltage pulse

Plasma propagation speed and electron temperature in surface-discharged alternating-current plasma display panels

Comparison of VUV and IR emission in an AC surface discharge with nanosecond time resolution

Improvement of the luminous efficiency of plasma display panels by numerical simulation

Detailed investigation on the neon-xenon mixture as filling gas for mercury-free fluorescent lamps

Anode phenomena of thermionic electrodes

The temperature and radiant power emitted from DC horizontal short free arc discharge between tungsten electrodes near 50A

The vacuum spark point source (VSX 6a) for X-ray lithography

Characteristics of ozonizer using pulsed power

PSpice-based modeling of pulsed corona reactor-generator system

A crossed-flow pulsed corona reactor

Production of large volume streamer discharges in atmospheric air using ultrashort electrical pulse

Discharge processes of NO gas using bi-directional pulsed voltage

Bacterial decontamination of water by means of pulsed corona discharges

Bacterial decontamination of coastal seawater by means of electrical discharges

Destruction of volatile organic compounds in air by means of DC and pulsed high pressure glow discharges

Repair time of bacteria after pulsed electric field application

Novel plasma reactor using honeycomb ceramics driven by a fast Si-thyristor for environmental applications

Effects of the resistive barrier discharge on bacterial viability, biochemical pathways, and morphology

Impedance matching for one atmosphere uniform glow discharge plasma (OAUGDP) reactors

Increasing the surface energy of nonwoven fabrics by exposure to a one atmosphere uniform glow discharge plasma (OAUGDP)

On decomposition of CH/sub 4/ and CO/sub 2/ by barrier discharge

Multipoint barrier discharge for removal of NO/sub x/ from diesel engine exhaust

An analysis of carbonaceous deposit formed by barrier discharge

A study on dye wastewater by application of high impulse current

Generation of focused shock waves by multi-channel discharge in water

Removal of phenol in water by pulsed high voltage discharge

Electric pulse rock sample disaggregator

Pulsed electric field based antifouling method for salinometers

Flue gas treatment of nitrogen oxides by pulsed relativistic electron beam

Modeling the neutron yield of a therapeutic thermal neutron source driven with a repetitively pulsed electron linac

Applications of thermal neutron generators driven with a repetitively pulsed electron linac

High-power pulsed light and acoustic radiation and possibilities of their application

Effects of excimer UV radiation on microorganisms

Stabilization of thermal plasma in an plasma generator

A pulsed power supply system for producing high intensity magnetic and electric fields for medical applications

Study of high-voltage diffused gas discharge effect on microbiological cultures

Separation of radionuclides from nuclear waste by a plasma mass filter

A pulsed power system for food sterilization

Plasma technologies of solid and liquid toxic waste disinfection

Portable nonequilibrium plasma surface decontamination system

Magnetic flux compression by magnetic field of the generator MC-1 experiment

Computational investigation of operating conditions of the cascade generator MC-1 with large HE charge

Numerical models of magnetocumulative MC-1 generator testing

Development of highly stabilized and high precision power supply for KCCH cyclotron magnet

Fast rising, slow decaying magnetic field generator for special applications in UK industry

On analysis of physical effects on the surface of the electrodes of rail launchers

High current pulse forming by modularized capacitor banks

High-efficient electromagnetic launch system using energy recovery

Performance of the Kirkcudbright capacitor bank system modifications for ETC operations

Three-dimensional time-domain calculations for EMP simulators

Circuit model for parameter study of Mrx generators on megajoule machines

Pulse forming lines for square generators

Repetitive operation of water-filled Blumlein generator

Pulse power system of linear induction accelerator for fnal neutrino factory

MOSFET switched 20 kV, 500 A, 100 ns pulse generator with energy recovery circuit

20-MW-long-pulse solidstate-klystron modulator

A FET based kicker for a charge booster for the TRIUMF ISAC project

Periodically pulsed high voltage generator based on Tesla transformer and spiral forming line

Repetitive pulsed-power generator "ETIGO-IV"

Development of a magnetic pulse compression modulator for flue gas treatment

Hypervelocity powder deposition by pulsed power magnetic compression device

Repetitive pulse power system for pulsed corona gas treatment research

Solid state pulsed power module (SSPPM) design for a dense plasma focus (DPF) device for semiconductor lithography applications

Improvement of a high repetitive rate static impulse voltage generator

Megavolt repetitive SOS-based generator

Pulse step modulation to produce very fast solid state pulses

A solid state modulator for driving SLAC 5045 Klystrons

Flexible IGBT modules for high voltage high power modulator applications

A three-phase 100 kV, 200 kVA automatic repetitive charging system

A constant current high voltage capacitor charging power supply for pulsed power applications

Multi-megawatt solid state RF source

Nanosecond pulse generation with nonlinear capacitors and magnetic power compression

A non-LTE radiation transport model suitable for multi-dimensional hydrodynamic calculations

K-Shell scaling of high photon energies on the Z accelerator

Two-dimensional MHD simulations of a neon z-pinch

Proof-of-principle laser-induced fluorescence measurements of gas distributions from supersonic nozzles

First results for an argon z-pinch at currents above 15 MegaAmps

Z-pinch tests of nickel at 18 MegaAmps and atomic number scaling considerations

Current scaling of optimum K-shell X-ray yield and load mass applied to argon gas-puff z-pinches

Electron-beam sustained plasmas in optically pumped atmospheric pressure air

Nonequilibrium discharges in atmospheric pressure air

Repetitive, pulsed electron heating in atmospheric pressure glow discharges

Radiofrequency initiation and radiofrequency sustainment of laser initiated seeded high pressure plasmas

Laser ionization and radiofrequency sustainment of high-pressure seeded plasmas

Direct-current glow discharges in atmospheric pressure air and nitrogen plasmas

Numerical modeling of repetitively pulsed discharges in flowing atmospheric plasmas

Dynamics of a charged particle in a linearly polarized traveling electromagnetic wave

Electron-hole plasmas in semiconductors

Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

Dynamics of plasmas sustained by repetitive ultrahigh-voltage DC or subpicosecond laser pulses

Instabilities in inhomogeneous complex plasma

Atlas - a new pulsed power tool at Los Alamos

Solid state pulsed power systems for the Next Linear Collider

Design considerations of fast kicker systems for high intensity proton accelerators

Prototype IVA module (PIM)

Electrical contacts and conductors for megaamperes pulse currents

Simulation of semiconductor opening switch physics

Semiconductor switches replace thyratrons and ignitrons

Ultra-high-power repetitive solid state DBD-based switching

Theoretical and experimental investigation of high-current solid-state opening switch based on solid solution (V/sub 1-x/Cr/sub x/)/sub 2/O/sub 3/

High energy density physics and high resolution point-projection imaging with X pinch plasmas

Diagnosing Z pinches with pinhole imaging at various photon energies

X-ray temporal, spatial and spectral study of 0.9 MA X-pinch Ti, Fe, Mo, W and Pt radiation sources

Evolving approaches to pulsed X-ray sources

Ar implosions on Decade Quad

Progress in current scaling and optimization of argon K-shell radiation in a Z-pinch

Radial density and temperature distributors in a Z-pinch inferred from time and space resolved spectra on Decade Quad

Summary of the Rayleigh-Taylor instability studies at the Pegasus facility

Linear experiment on verification of Rayleigh-Taylor instability magnetic stabilization effect (joint LANL/VNIIEF experiment Pegasus-2)

Material science experiments at the Atlas facility

Design and operation of high energy liner implosions at 16 MA for studies of converging shocks

Measurement of the current and symmetry of the impact liner on the NTLX experiments

Development and fielding of high speed laser shadowgraphy for electro-magnetically driven cylindrical implosions

Radiographic results from the NTLX series of hydrodynamic experiments

Intense pulsed ion-beam ablation for material applications

Thin foil acceleration by intense pulsed ion beam ablation

Intense pulsed heavy ion beam acceleration using bipolar pulse for implantation to semiconductor

Space charge and current neutralized ion beam transport in laser initiated transport channels

Multi-megavolt, multi-axis, high-resolution flash X-ray source development for a new hydrodynamics research facility at AWE Aldermaston

Recent X-ray diode and magnetically insulated transmission line experiments performed on the 5.5MV Superswarf Machines at AWE Aldermaston

Micro processing by intense fast electron beams

A 100-MW, electron-beam-pumped, argon fluoride laser for driving metal photo-cathodes

Pulsed power conditioning system for the Megajoule Laser

Overview and status of the power conditioning system for the National Ignition Facility

Progress in the reduction of inductance in the standard 100 kV energy storage capacitor

Ultimate properties of the polypropylene film for energy storage capacitors

Status quo and future prospects for metallized polypropylene energy storage capacitors

Rubidium filtered Thomson scattering measurement in an atmospheric pressure argon arc

NSTX diagnostics for fusion plasma science studies

Measurement of the plasma potential in a magnetron discharge and the prediction of the electron drift speeds

Dust grains as a diagnostic tools for sheath measurement in RF-discharge plasma

Visualization of a filamentary plasma objects in supersonic airflow

Optical diagnostics methods of plasma current channels in plasma current open switches of the developed EMIR complex

Experimental study of pulse corona discharge in aqueous electrolytes

Registration of spatial-temporal parameters of discharged plasma in explosive experiments MAGO

Spectroscopic investigations of high-pressure microhollow cathode discharges

Combined vacuum ultraviolet and optical emission analysis of an inductively coupled plasma

LIF diagnostic development for diffusion coefficient measurements in low temperature Ar II plasmas using diode lasers

Planar probes in diffusive plasmas

Temporal evolution of the IEDF in a pulsed electron-beam driven plasma

Properties of plasma in shielded dual-spiral antenna ICP system

Electron density and temperature measurements in pulsed atmospheric pressure air plasmas

Effects of cold neutral gases on the high density plasma

Ion flux and energy distributions at electrode surfaces in LAPPS

Operating regions and transitions for low-pressure inductively coupled oxygen plasmas

A comparison of a Langmuir probe technique with an emissive probe technique to measure the plasma potential in a RF plasma

High-resolution X-ray spectromicroscopy of fs laser-produced plasma by tunable, high-luminosity spherical crystal spectrometers with X-ray CCD or MCP

Development of a new analysis algorithm based on the wavelet transforms for noisy Langmuir-probe traces

Biased Langmuir probe measurement for pulsed high-voltage glow discharge

Investigation of long-pulse plasma immersion ion implantation

Heavy ion beam probe development

Calibration of electric field induced energy level shifts in argon

Dissipative instability of overlimiting electron beam

Electron number density and collision frequency measurements in a microwave surface wave discharge

Air constituent plasmas produced by a radiofrequency plasma source

Direct current glow discharges in atmospheric air

Electron removal rate modification in optically pumped plasmas

Microwave plasma initiation mechanisms in a circular tube with a radius below the cutoff value

Theoretical studies and numerical simulation of propagation, reflection and action of regular and stochastic electromagnetic radiation to plasma particles at its incidence to plasma-vacuum surface

Design and construct a microwave plasma jet system for material processing

Weakly ionized plasma channel by accumulation effect of charged particles using high repetition rate excimer laser

Employment of the pulsed ion accelerator as a high-power intermediate energy neutron generator for remote detection of nuclear explosives

Large radius Z-discharge transport channel studies for applications on saturn

The influence of high-power pulsed electron beam on surface properties of stainless steel X18H10T

Self-magnetic field effects on emission in planar diodes as the critical current is approached

Nonlinear dynamic processes in the electrostatic plasma lens and their influences on ion beam focusing

Application of high-power microsecond REB for inducing solid-state transformations under special pulse-pressure conditions

The implementation of rod pinch diodes on negative polarity pulse power machines

Modification of diode X-ray radiation by electron multiple back-scatter from anode

Model of quasi-steady-state electron-beam pinch in rod-pinch diodes

Structural analysis of a high-speed tool steel irradiated by an intense pulsed ion beam

Effect of in-situ pulse-heating of Ta anodes on the radiation from bremsstrahlung diodes

Experimental shock wave measurement using a pulsed electron beam

Transport experiments of a 2.2 GeV gold ion beam in a plasma channel at the GSI-UNILAC facility

Numerical generation of radiographer's equations for rod-pinch electron beam diodes

Electron distribution function in e-beam generated KrF amplifier

Pulsed intense electron beams produced in high voltage hollow cathode discharges: a comparative study

Generation of intense pulsed ion beams by Br magnetically insulated ion diodes

Electron beam characteristic of multi-gap pseudo-spark discharge system

Emittance measurement of space charge dominated electron beam confined by a longitudinal magnetic field

Measurement of ion beam current and position for the Korea Multipurpose Accelerator Complex (KOMAC)

The dynamics of the fields induced by beam front in short pulse systems

Metallic jet production using pulsed electrical discharges in water

Concave variable-mass liner

The magnetically driven imploding liner parameter space of the Atlas capacitor bank

Performance of the DARHT first axis pulsed power system

Liner velocity, current, and symmetry measurements on the 32 MA flux compression generator experiment ALT-1

Current shunting in experiments on z-pinch compression

Optical diagnostics of plasmas created by relativistic heavy ion beam interaction with solid targets

Foil acceleration by intense, pulsed, light-ion beam ablation

Liquid butane filled load for a liner driven Pegasus experiment

Using pulsed power for hydrodynamic code verification and validation

Non-contact optical three dimensional liner metrology

Laser induced tension and equation of state

A proposed Atlas liner design fabricated for hydrodynamic experiments on Shiva Star

Extended liner performance for hydrodynamics and material properties experiments

Laser radiography

On the possibility of a 10/sup 16/ per cc density, 1 meter long plasma for accelerator applications

Behavior of ablated plasma in laser-triggered vacuum switch

Thermomagnetic instability of metal-insulator phase boundary

Solid solution (V/sub 1-x/Cr/sub x/)/sub 2/O/sub 3/ as material for solid-state opening switches

Current propagation between a plasma opening switch and a load during opening

Dynamics of downstream plasma in the plasma opening switch

Plasma opening switch with extrinsic magnetic field

Conduction phase energy losses in microsecond plasma opening switch

The increase of duration of plasma opening switch conduction phase

Interferometer diagnostics of plasma current open switch injector

Electroexplosive current commutation. The coupling of parameters of inductive-capacitive storages and loads

Novel gaseous plasma gun for plasma opening switch

About combination of two opening switch (Vacuum Interruptor+Peois) and pulser on its base

Inductive cascade with electrically-explosive current commutation to be used for electrical pulse power amplification

Continuing development of a low density POS for PRS loads on Double-EAGLE

Experimental validation of a MACH2 cablegun code

A ring carbon plasma gun for the plasma opening switch

Energy extraction in the CERN large hadron collider (LHC)

Improvement of power conditioning for a pulsed plasma source applying the storage inductor of variable inductance

Numerical simulation of conductivity stage of microsecond current plasma open switch in the context of two-temperature MHD with Hall current

Hysteresis characteristics of electric induction and electric field in nonlinear capacitors

Early results from the floating potential probe on the International Space Station

40 cm prototype ion thrusters

Special 10kV solid state power modulator for plasma immersion ion implantation treatment of industrial bearings

100ns current rise time LTD stage

Atlas facility fabrication and assembly

E Minor upgrade

Skin-type resistance and measurement of heavy-current circuit parameters

Calculation of inductive electric fields in high-current pulsed devices using electric vector potentials

Atlas acceptance tests

Short pulse generation in dielectric by a sequence of electron bunches

A flexible control scheme for current wave forming using multiple capacitor bank units

Design and first results of a 4 MA strip line generator to produce magnetic pressure for material studies

Field leakage study and possible ways of improving compression generator parameters

Direct comparison of properties for compression generators of pulsed current with iron-core and air-core rotor done by mathematic simulation

Usage of the spiral pulsar in the high voltage-current generator system

NIF power conditioning system testing at LLNL

Automated test system for NIF flashlamps

A fault analysis and design consideration of pulsed power supply for high power laser

Pulsed power system for the PHELIX kilojoule/petawatt-laser at GSI Darmstadt

Lifetime and reliability data of commercial excimer laser power systems modules

An investigation into the optical emission from pulsed planar surface discharges and their application for the pumping of dye lasers

Safety grounding approach for the NIF power conditioning system

Very high voltage, ultra-high power density, rotating electrical machines as compact pulsed power supplies

Compact, battery powered, 400-kV, 40-joule portable Marx generator

High voltage testing of capacitors

High current testing of batteries

A novel methods of current pulse shape conditioning applied to two-phase passive compulsator

High rep-rate operation of pulsed power modulator using high voltage static induction thyristors

Modeling of an inductive adder kicker pulser for a proton radiography system

A capacitor-charging power supply using a series-resonant three level inverter topology

Imploding Z-pinch plasma diagnostics by using a laser shearing interferometer

Cavity ring-down spectroscopy of N/sup 2+/ in pulsed and DC atmospheric pressure discharges

"Temperature measurements in optically pumped nonequilibrium plasmas by laser induced fluorescence of vibrationally excited carbon monoxide"

Generation of laser-bullets-fast moving plasma blocks by interaction of intense laser pulse with plasma

Time resolved Langmuir probe measurements on a pulsed ICP source

Nonstationary behavior in gyrotron oscillators

Novel mode-selective gyrotron with a PBG resonator

Higher order mode excitations in gyro-amplifiers

Phase retrieval of gyrotron beams from intensity measurements using the moment method

Simulations of multifrequency processes in fast wave devices by MAGY

Rod-pinch diode development for short-pulse radiography using extended-length cathodes

Multi-shot performance of a 1-MV, 15-kA rod-pinch-like diode for radiography

Adaptation of ASTERIX to positive polarity for 2 to 4-MV rod-pinch diode experiments and diode electrical analysis

Evaluation of the rod-pinch diode as a high-resolution source for flash radiography at 2 to 4 MV

Rod pinch radiography source optimization at 2.3 MV

The impedance characteristics of a rod-pinch diode

Plasma-filled rod-pinch diode experiment on Gamble II

Systems analysis, modeling, simulation, and signal processing aspects of coordinated experimental and modeling investigations of high-speed gas discharge switch breakdown behavior

Sub nanosecond jitter operation of Marx generators

Investigation the optimal method for improvement the protective characteristics of gas filled surge arresters w/o the built in radioactive sources

Nano- and picosecond pulsers on the basis of FED and DRD

Gas breakdown field and arc risetime dependency on high pressure and short stress times

Gas breakdown in the sub-nanosecond regime with voltages below 15 kV

"windowtron" RF breakdown studies at SLAC

Personnel protection from electrocution through whip antennas

Mechanisms for electron energy transport and electron energy distributions in magnetically enhanced inductively coupled plasmas

Ionized plasmas in air

Ionization waves in shielded capillary discharges

Tunable vircators with E-beam premodulation

Vircators and the magnetic field

Design and setup of a short pulse simulator for susceptibility investigations

The Gatling Marx generator system

Gyrotron beam heating of ceramic coatings and joints

Advanced high power gyrotrons

Relaxation of 2D MHD flow transverse to a magnetic field in a bounded domain

Implications of recent improvements in conductivity models on liner, wire, and fuse design

On possibility of high pressure generation using impacting liners driven by disk EMG

MHD modeling of ATLAS experiments to study transverse shear interface interactions

Etching, sidewall passivation and microtrenching in contact holes and edge regions

An integrated plasma equipment - feature scale model for the Bosch deep Si etch process

Two-dimensional modeling of pulsed inductively coupled plasmas with and without a substrate bias

Anisotropic etching of cesium iodide

Development of an ion energy flux sensor for plasma processing

Quick preparation of thin films and nanosize powders by high-density ablation plasma produced by intense pulsed ion beam

Single-walled carbon nanotube formation in a high-pressure non-equilibrium carbon monoxide plasma

PFC gas decomposition using plasma-assisted catalytic technology (PACT)

The transient behaviour of uniform LC pulse forming networks

High-power, high-voltage generator with a multi-pulse twin output

Pulsed power research at Loughborough University

Design of a 150 kV, 300 A, 100 Hz Blumilein coaxial pulser for long pulse operation

Nanosecond and subnanosecond repetitive pulsed power systems

All-solid-state trigger-less repetitive pulsed power generator utilizing semiconductor opening switch

Subnanosecond modulator possessing a 700 MW peak power and average power of 1.5 kW at repetition frequency of 3.5 kHz

Triggering and guiding large scale leader-discharges with ultrashort laser pulses

Modeling large scale leader discharges in presence of a laser-created plasma channel

Microplasmas produced with sub-millijoule laser pulses for laser induced breakdown spectroscopy

Formation clusters in different gas jet nozzles and their radiation properties under interaction with high-intensive fs laser pulses

SKVIN-1 bench for studying of breakdown mechanisms of insulating gaps with short voltage pulses

Current quenching phenomenon in the pseudospark discharge

The ion plasma sheath in the DC atmospheric pressure barrier discharge

Measurement of excitation temperature on a microwave induced atmospheric plasma

Plasma parameters of MSE sustained high pressure glow discharges

Properties of plasmas generated by a sheath-helix antenna

Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmas

Research on high density plasma of pulsed discharge in water

A plasma loudspeaker using a DC carbon arc in a modulated magnetic field

Why high pulsed currents shatter metal wires?

MHD modeling of magnetized target fusion experiments

Modeling of metallic jet production using pulsed underwater discharges

Efficiency of the magnetic flux compression by a plasma shell

MAGO chamber with a special section for additional plasma compression. Calculation results

2-D calculations of magnetic field diffusion in the task "loop above the armature"

Investigation of stabilization mechanisms of global MHD instabilities in z-pinches

MHRDR modeling of z-pinches at the Nevada Terawatt Facility

Long-pulse relativistic backward wave oscillator operation utilizing a disk cathode

Effects in a high power BWO induced by the exhausted electron beam

Initial operation of an ultra-compact, low voltage Reltron microwave source

Linear theory of a dielectric Cherenkov maser amplifier with a near-surface plasma layer

Experimental observation of modulation modes of powerful microwave pulses produced by a 5-nanosecond width Ka-band backward wave oscillator

Cerenkov generators with overmoded one-sectional slow-wave structures

Dynamics of overlimiting electron beam instability in plasma-filled waveguide

650-kJ power supply for one-second highly-stable magnetic field source

S-band vircator with e-beam premodulation based on compact HV pulser with inductive energy store

Effect of electron-beam pulse length on microwave efficiency of coaxial vircator

Characteristic of vircator output at various A-K gap distances with diode perveance

Computer modelling of a coaxial VIRCATOR

Multipactor experiment on a dielectric surface

Relativistic L-band magnetron and nonrelativistic oven magnetron experiments

Repetitively-pulsed relativistic magnetron

TEM-horn antenna excitation by pulsed intense relativistic electron beam

High-frequency electron beam modulation, transportation and its interaction with slow-wave structure

Three-dimensional PIC simulations of a load-limited MILO

Cathode improvements for a magnetically insulated transmission line oscillator (MILO)

Theory of one-dimensional Bragg lattices of planar geometry

Investigation of polarization structure of ultrawideband radiation pulses

Ultrawideband radiators of high-power pulses

The Marx generator as an ultra wideband source

Design of two-stage tapered harmonic multiplying Gyro-TWT

2-D and 3-D PIC simulations of a SLAC Klystrino

Cherenkov radiation in the THz frequency range from a magnetized plasma

An axial monotron with rippled wall resonator

Second-harmonic fundamental-mode slotted peniotron

Second-harmonic axis-encircling-beam TE21 gyro-TWT amplifier

An analytic theory of spatial power deposition profiles in gyro-device collectors

TE/sub 0n/ mode clustered-cavities and extended interaction cavities for wideband gyro-amplifiers

94 GHz heavily loaded TE/sub 01/ gyro-TWT

X-band magnicon amplifier experiment

A 460 GHz gyrotron oscillator for use in DNP/NMR spectroscopy

94 GHz sixth-harmonic slotted gyrotron

Phase bunching in the harmonic multiplying gyrotron traveling wave amplifier

Effect of axial momentum spread on radiation growth rates in a spatiotemporally gyrating electron beam

Design of a W-band gyrotwystron amplifier

Study of gyrotron oscillators by 3-D particle simulation

Design and operation of a four-cavity gyroklystron circuit

On the frequency scaling of coaxial gyroklystrons

3rd-Harmonic operation of SIT inverter RF source for ICRF heating in the divertor plasma simulator NAGDIS-II

Studies of a TE/sub 04/ mode, wideband, triplet gyrotron amplifier with harmonic multiplication

Stability of gyro backward wave oscillation

The impact of particle desorption on DARHT-II electron beam dynamics

Development of super-size, high performance ferrite toroids for the pulsed power applications

Beam emittance diagnostic for the DARHT second axis injector

High-power LINAC for the spallation neutron source

AIRIX induction accelerator performances at CEA

3-D PIC simulations of electron flow in the vacuum power flow section of the Z accelerator

Repetitive linear induction accelerators for high-current electron devices

Testing pulse forming networks with DARHT accelerator cells

Testing Metglas for use in DARHT accelerator cells

Operation of the Z accelerator in a long-pulse mode

A proposed accelerator cell and pulsed power design for the prototype Relativistic Klystron Two-Beam Accelerator (RTA)

Decade Quad water coupler-electrical design and performance

Analysis of current distribution in the zone of high speed sliding contact of the pulsed electromechanical converters

Design and simulation of X-ray backlit targets for z-pinch hohlraum symmetry experiments

Current doubling in load design for Z-pinch driven ICF

Indirect drive ICF using highly supersonic, radiatively cooled, plasma slugs

Self-focusing of relativistic electron bunches in a dense plasma

Proposed restructuring of the American fusion program around the fission fusion hybrid

Characteristic performance of the ICRF heating in the divertor plasma simulator NAGDIS-H

Pulsed electric system for production and confinement of plasma in ETE (Spherical tokamak experiment)

Pre-ionization experiments on a high-density field reversed configuration suitable for magnetized target fusion

Method for detection and measurement of impurities in plasmas formed and compressed to magnetized target fusion conditions

Mode conversion processes for electron Bernstein wave excitation in spherical tori

Numerical simulations of Plasma/Magnetic Field/Liner interactions in magnetized target fusion systems

Effect of the cavity structure on the discharge features of pseudosparks

Multi gap switch for Marx generators

Externally triggered gas diverters for water line protection

Optimization of the SF/sub 6/-N/sub 2/ gas mixture composition in a high-power nanosecond bipolar voltage generator

Commutating equipment of the low-inductance high-voltage capacitive storage module

Features of the pseudospark switch operation at a low anode voltage

Resistance of pulsed arc discharge in air and SF/sub 6/

Computational simulation of the time dependent resistance and inductance of a field distortion spark gap

A finite element flux-corrected transport analysis on the transient switching characteristic of high power trigatron

Recent measurements of the ferratron; a high-voltage, fast risetime gas switch with a ferroelectric trigger

Temperature stability of components for over-voltage protection of low-voltage systems

Tests of 6-MV triggered switches on APPRM at SNL

Fast protector against EMP using electrical field induced resistance change in La/sub 0.67/Ca/sub 0.33/MnO/sub 3/ thin films

Switching properties of series connected static induction thyristor stack

Spectroscopic measurement of high current vacuum arc plasma in triggered vacuum switch

High voltage high-current commutator based on the series connected triggered vacuum switches

On conductance of insulators isentropically compressed by megabar pressure

Electrical discharge characteristics in water and shockwaves

Study of breakdown characteristics of solid insulator under different length of high voltage pulses

Studies of plastic insulators under shock conditions

Insulator surface features resulting from cutting techniques

High-voltage pulse testing of cables on Hawk

Insulator secondary electron emission and surface charge measurements by electron energy spectrometry

Surface flashover characteristics of solid CL-Polystyrene and related materials

Carbon nanostructure growth in an inductively coupled plasma

A study of plasma-polymerized aniline films

Metal arc plasma ion implantation of materials used in aerospace applications

Analysis of materials processed by ablation plasma ion implantation

A wet plasmascrubber for use in industrial pollution control

Plasma cleaning of various electronic packaging materials to improve adhesion property

An analysis of streamer discharge using a high-speed camera

Surface modification of stainless steel using nitrous oxide/oxygen glow discharge plasma for biomedical application

High-brightness negative ion beams from a plasma source and merits for new applications in materials science and microelectronics

Synthesis of nanosize powders of aluminum nitride by pulsed wire discharge

Preparation of epitaxial Y-Ba-Cu-O thin films by pulsed ion-beam evaporation

Characteristics of Cr-Al-N films prepared by pulsed laser deposition

Preparation of polycrystalline silicon thin films by pulsed ion-beam evaporation

Theoretical investigation of the effects of AC applied voltage on film unformity in dual plasma deposition

Influence of target geometry on maximum electric field in plasma immersion ion implantation

Control of implantation area in direct-current plasma immersion ion implantation (DC-PIII)

Consideration of target platen materials in plasma immersion ion implantation

Effects of anode materials on explosive field emission diode performance

Drive signal frequency multiplication in a hybrid antenna-amplifier device

Traveling-wave tubes and backward-wave oscillators with weak external magnetic field

The axial monotron as a high-power microwave tube

Multichannel planar FEM as a base for archiving large energy content in pulses of coherent mm-radiation

The Effects of Intense RF Pulses on Electronic Circuits and Systems - A New University Center-of-Excellence

Kinetic modeling of the electron current collection to a moving bare electrodynamic tether

Hybrid PIC-Vlasov method

Linked PIC/Monte Carlo simulations for modeling X-ray radiography

Nonlinear characteristics of RF-wave heated plasma in tokamaks

Final design and initial results for the decade-quad PRS mode water coupler

Pulse power for future X-ray simulators

Ultrafast LTDs for brems diodes and Z-pinch

Design of a driver for the Cygnus X-ray source

Energy balance of the TW pulsed power generator KALIF-HELIA

Tests of the first RITS PFL and cell

Progress in the optimization of photosensitized disinfection and decontamination processes using pulsed and CW ultraviolet light sources

High-power short pulsed corona: investigation of electrical performance, abatement of SO/sub 2/ and ozone generation

Effect of radial transport on the plasma remediation of nitrogen-oxides using dielectric barrier discharges

Removal of dilute SF/sub 6/ in He by a pulsed corona reactor

Investigation of microbial cell inactivation using plasma discharge treatment of liquids

Thermal pulsed-plasma technology for hazardous waste treatment

Core performance in direct-drive spherical implosions on OMEGA

Variations and characteristics of dynamic Hohlraums on Z

Optical properties of femtosecond laser-heated ultrathin foils

Fast ignitor related studies at ILE, Osaka University

High energy density plasmas produced by femtosecond-laser driven shocks

X-ray photoabsorption of warm dense matter

A new National basic research program for compact, portable pulsed power

A novel energy storage device

An ultra-compact Marx HV generator

Solid-state kicker pulser for DARHT-2

Compact 12.5 MW, 55 kV solid state modulator

Compact design of a 30 kV rapid capacitor charger

New directions in solid-state compact, high voltage radar modulators

Physics of the interaction of pulsed magnetic fields with plasmas and relevance to applications

Results and simulations from the triggered plasma opening switch experiment

Observation of plasma motion in a coaxial plasma opening switch with a chordal laser interferometer

Implementation of the ACE 4 plasma opening switch on the Decade Quad

Density measurements in flash board plasmas for a magnetically confined plasma opening switch

Compact vacuum arc thruster for small satellite systems

Numerical modeling of a pulsed plasma thruster

Numerical modelization and optimization of flux compression experiments

Isentropic compression of metals, at multi-megabar pressures, using high explosive pulsed power

Sharpening the power pulse on S-300 machine by using nanosecond plasma flow switch

Radiatively cooled supersonic plasma jets generated in wire array z-pinches

Using tamped exploding wires to generate strongly coupled plasmas

High performance plasmas in the National Spherical Torus Experiment (NSTX)

Preliminary neutron scaling of the TAMU 460 kJ plasma focus

Progress on formation of field reversed configurations suitable for subsequent compression to magnetized target fusion conditions

Powerful pulsed laser application in setups for magnetic fusion energy

PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference. Digest of Papers (Cat. No.01CH37251)

An integrated plasma equipment - feature scale model for the Bosch deep Si etch process

Content Provider	IEEE Xplore Digital Library
Author	Rauf, S. Ventzek, P.L.G. Dauksher, W.J.
Copyright Year	2001
Abstract	Summary form only given. The Bosch Si etch process combines the desirable etching characteristics of SF/sub 6/ with the polymerization properties of fluorocarbon gases to anisotropically etch deep and narrow features at a high etch rate. This process is currently being explored for SCALPEL (Scattering with Angular Limitation in Projection Electron Beam Lithography) mask fabrication. Due to the large number of process variables available, optimization of the Bosch process is a nontrivial task. There are also stringent requirements for etch rate, uniformity and feature sidewall angle. To aid in Bosch etch process development, an integrated plasma equipment feature scale model has been developed. This model couples a 2-dimensional simulation of the plasma reactor (based on Hybrid Plasma Equipment Model from the University of Illinois) with a string based feature profile model. The chemical mechanisms for the etching (SF/sub 6//O/sub 2/) and passivation (c-C/sub 4/F/sub 8/) plasmas incorporate known information about electron impact processes in these gases, as well as many heavy particle collisions. The surface etching and passivation mechanisms for the feature scale simulation are based on qualitative information available in the published literature. Quantitative data such as sticking coefficients has, however, been inferred indirectly from process experiments. The resulting model closely replicates experimentally observed plasma and etch characteristics. In this presentation, we describe the integrated model, discuss our experimental validation strategy and apply the model to understanding the Bosch etch process. Results show that Si etching is mainly due to F atoms, polymerization in c-C/sub 4/F/sub 8/ is due to sticking of C and CF/sub x/ radicals under ion bombardment, and polymer is etched through ion-assisted physical sputtering. An optimum etch process is obtained by carefully controlling polymerization and etching times, wafer temperature, ion energy and process variables that control species fluxes to the wafer.
Sponsorship	Plasma Sci. & Applications Committee
File Size	80577
File Format	PDF
ISBN	0780371410
DOI	10.1109/PPPS.2001.961251
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-06-17
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasma applications Plasma simulation Polymers Plasma chemistry Sputter etching Plasma properties Gases Passivation Temperature control Anisotropic magnetoresistance
Content Type	Text
Resource Type	Article

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