NDLI: Macromodels of 3D lateral viscous damping effects for MEMS devices

Content Provider	IEEE Xplore Digital Library
Author	Po-Ching Yen Yao-Joe Yang
Copyright Year	2003
Description	Author affiliation: Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan (Po-Ching Yen; Yao-Joe Yang)
Abstract	In this work, a fast algorithm of generating accurate time-domain macromodels of viscous lateral damping for three-dimensional MEMS geometries is described. A three-dimensional finite-difference (FDM) Stokes flow solver for simulating lateral damping effects was developed. The system matrices generated by the solver was then reduced to low-order macromodels that can be easily inserted into a system-level modeling simulators, such as Saber, Simulink or SPICE for transient and frequency analysis. The macromodels have proved to be about three-order-of-magnitude as efficient as the FDM solver, while preserve the 3-D edge effects that usually require expensive 3-D BEM or FEM calculations. Experimental results of quality factors for comb-drive devices demonstrated that the error of the results estimated by the macromodels is within 15%.
Sponsorship	IEEE Electron Devices Soc
Starting Page	1848
Ending Page	1851
File Size	300845
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1217148
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Damping Microelectromechanical devices Transient analysis Time domain analysis Micromechanical devices Geometry Finite difference methods Analytical models SPICE Frequency
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in