NDLI: Dynamics of mechanically and electrostatically coupled microcantilevers

Content Provider	IEEE Xplore Digital Library
Author	Napoli, M. Wenhua Zhang Turner, K. Bamieh, B.
Copyright Year	2003
Description	Author affiliation: Dept. of Mech. Eng., California Univ., Santa Barbara, CA, USA (Napoli, M.; Wenhua Zhang; Turner, K.; Bamieh, B.)
Abstract	In this paper we study the behavior of a pair of electrostatically and mechanically coupled microcantilevers. For the case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are governed by a pair of coupled Mathieu equations. We provide experimental evidence that confirms the validity of the mathematical model proposed, including in particular a mapping of the first order coupled parametric resonance region. The mechanical coupling coefficients are identified from experimental data, and their values are shown to match well those obtained by finite element methods.
Sponsorship	IEEE Electron Devices Soc
Starting Page	1088
Ending Page	1091
File Size	319002
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1216958
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Equations Mathematical model Capacitors Finite element methods Displacement control Voltage control Geometry Sensor arrays Electrostatics Mechanical engineering
Content Type	Text
Resource Type	Article

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Dynamics of mechanically and electrostatically coupled microcantilevers