NDLI: Thermally actuated, bi-stable, snapping silicon membranes

Content Provider	IEEE Xplore Digital Library
Author	Arya, R. Rashid, M.M. Howard, D. Collins, S.D. Smith, R.L.
Copyright Year	2003
Description	Author affiliation: Microinstrum. & Syst. Lab., California Univ., Davis, CA, USA (Arya, R.; Rashid, M.M.; Howard, D.; Collins, S.D.; Smith, R.L.)
Abstract	Thermally actuated, bistable, snapping silicon membranes have been fabricated on a silicon wafer and tested. Nonlinear finite element analysis has been used to model the snapping behavior of the membranes and to refine their design. A unique feature of these membranes is that after snapping down, they remain in the downward buckled state as the temperature decreases back to its starting point. The critical snapping temperature range is 50/spl deg/C-60/spl deg/C for 2 mm square, 6 /spl mu/m thick membranes with 1 /spl mu/m SiO/sub 2/ on top and 3 /spl mu/m aluminum deposited on the backside. The snapping temperature can be varied by changing the dimensions and materials used in the membrane fabrication.
Sponsorship	IEEE Electron Devices Soc
Starting Page	1411
Ending Page	1414
File Size	339939
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1217039
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Biomembranes Switches Plasma temperature Aluminum Actuators Finite element methods Fabrication Microrelays Microvalves
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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