NDLI: Bimetallic nanoparticles for optimizing CMOS integrated SnO gas sensor devices

Content Provider	IEEE Xplore Digital Library
Author	Mutinati, G.C. Brunet, E. Yurchenko, O. Laubender, E. Urban, G. Koeck, A. Steinhauer, S. Siegert, J. Rohracher, K. Schrank, F. Schrems, M.
Copyright Year	2014
Description	Author affiliation: Mater. for Microelectron., Mater. Center Leoben Forschung GmbH (MCL), Leoben, Austria (Koeck, A.; Steinhauer, S.) \|\| Ams AG, Unterpremstaetten, Austria (Siegert, J.; Rohracher, K.; Schrank, F.; Schrems, M.) \|\| Freiburg Mater. Res. Center, Albert-Ludwigs-Univ. Freiburg, Freiburg, Germany (Yurchenko, O.; Laubender, E.; Urban, G.) \|\| Mol. Diagnostics, AIT Austrian Inst. of Technol. GmbH, Vienna, Austria (Mutinati, G.C.; Brunet, E.)
Abstract	We present gas sensor devices based on ultrathin $SnO_{2}$ films, which are integrated on CMOS fabricated micro-hotplate (μhp) chips. Bimetallic nanoparticles (NPs) such as PdAu, PtAu, and PdPt have been synthesized for optimizing the sensing performance of these sensors. We demonstrate that functionalization of nanocrystalline $SnO_{2}$ gas sensing films with PdAu-NPs leads to a strongly improved sensitivity to the toxic gas carbon monoxide (CO) while the cross sensitivity to humidity is almost completely suppressed. We conclude that specific functionalization of CMOS integrated $SnO_{2}$ thin film gas sensors with different types of NPs is a powerful strategy towards sensor arrays capable for distinguishing several target gases. Such CMOS integrated arrays are highly promising candidates for realizing smart multi-parameter sensing devices for the consumer market.
Starting Page	78
Ending Page	81
File Size	2978048
Page Count	4
File Format	PDF
ISBN	9781479943784
ISSN	19308876
e-ISBN	9781479943760
DOI	10.1109/ESSDERC.2014.6948762
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-09-22
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gas detectors CMOS integrated circuits Temperature sensors Films Metals Temperature measurement 3D integration nanotechnology bimetallic nanoparticles SnO2 nanocrystalline films gas sensors micro-hotplates CMOS integration
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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