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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chung-Yeh Wu Chin-Tien Lin Yen-I Chou Chieng-Chi Tung Wen-Chau Liu Huey-Ing Chen |
| Copyright Year | 2007 |
| Description | Author affiliation: Nat. Cheng-Kung Univ., Tainan (Chung-Yeh Wu; Chin-Tien Lin) |
| Abstract | In this work, the electroless plated (EP) Pd/InGaP high electron mobility transistor (HEMT) was firstly employed for hydrogen sensing. The current-voltage (I-V) characteristics under hydrogen concentrations of 5 ppm-1% and temperatures of 303-503 K were investigated. Experimentally, the Pd gate of three-terminal devices were successfully fabricated by the electroless plating method, and the studied devices exhibited excellent current-voltage characteristics with superior current control ability. For hydrogen sensing performances, the studied EP device demonstrated low detection limit, high sensitivity, and fast response. As compared with the thermal evaporated (TE) device, larger current variations can be achieved by the EP device. Even at extremely low hydrogen concentration, e.g., 4.3 ppm $H_{2}/air,$ obvious current modulation was found. The maximum relative sensitivity reaches up to 428 % at a optimal gate voltage of -0.75 V. Furthermore, the transient detections showed that the sensing response was fairly fast, especially at high concentrations and high temperatures. At detection temperature of 403 K, the time for 90% response at 1 % $H_{2}/air$ was within 4 seconds. These excellent sensing performances of the EP device indeed made it promising and competitive in future developments of smart hydrogen sensors integrated microelectronic systems. |
| Starting Page | 442 |
| Ending Page | 445 |
| File Size | 761961 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424411238 |
| ISSN | 19308876 |
| e-ISBN | 9781424411245 |
| DOI | 10.1109/ESSDERC.2007.4430973 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-09-11 |
| Publisher Place | Germany |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Hydrogen Temperature sensors HEMTs Sensor phenomena and characterization MODFETs Current-voltage characteristics Current control Tellurium Voltage Time factors |
| Content Type | Text |
| Resource Type | Article |
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