NDLI: Modeling the growth of thin SnO2 films using spray pyrolysis deposition

Content Provider	IEEE Xplore Digital Library
Author	Filipovic, L. Selberherr, S. Mutinati, G.C. Brunet, E. Steinhauer, S. Kock, A. Teva, J. Kraft, J. Siegert, J. Schrank, F. Gspan, C. Grogger, W.
Copyright Year	2013
Description	Author affiliation: Mol. Diagnostics, Health & Environ., AIT GmbH, Vienna, Austria (Mutinati, G.C.; Brunet, E.; Steinhauer, S.; Kock, A.) \|\| Inst. for Electron Microscopy & Fine Struct. Res., Graz Univ. of Technol., Graz, Austria (Gspan, C.; Grogger, W.) \|\| Inst. for Microelectron., Tech. Univ. Wien, Vienna, Austria (Filipovic, L.; Selberherr, S.) \|\| ams AG, Unterpremstaetten, Austria (Teva, J.; Kraft, J.; Siegert, J.; Schrank, F.)
Abstract	The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors to replace the bulky sensors of previous generations. Spray pyrolysis deposition is used to grow the required sensing thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. The implementation allows for a seamless integration of multiple processing steps for the manufacture of smart gas sensor devices. From observations it was noted that spray pyrolysis deposition, when performed with a gas pressure nozzle, results in good step coverage, analogous to a CVD process. This is due to the liquid droplets evaporating prior to contact with the heated wafer surface and subsequently depositing on top of the exposed silicon in vapor form.
Starting Page	208
Ending Page	211
File Size	865991
Page Count	4
File Format	PDF
ISBN	9781467357333
ISSN	19461569
e-ISBN	9781467357364
DOI	10.1109/SISPAD.2013.6650611
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-09-03
Publisher Place	UK
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gas detectors Semiconductor device modeling Level set Surface treatment Substrates
Content Type	Text
Resource Type	Article

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Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications

Gas sensing properties of the fluorine-doped tin oxide thin films Prepared by advanced spray pyrolysis

Effect of Annealing Temperature on Gas Sensing Performance of SnO2 Thin Films Prepared by Spray Pyrolysis

Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity.

Spray pyrolysis deposition for gas sensor integration in the backend of standard CMOS processes

Sensitivity enhancemenet in SnO2 based gas sensors by surface decoration with platinum nanoparticles

Characterization of Metal Oxide Sensor Thin Films Deposited by Spray Pyrolysis

Preparation of pure and modified SnO2 films by using spray pyrolysis for gas sensing application

Fabrication of a cost effective automatic controller for spray-pyrolysis technique to deposit thin films

Modeling the growth of thin SnO2 films using spray pyrolysis deposition

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