NDLI: Coupled-field modeling of microdevices and microsystems

Content Provider	IEEE Xplore Digital Library
Author	Wachutka, G.
Copyright Year	2002
Description	Author affiliation: Inst. for Phys. of Electrotechnol., Munich Univ. of Technol., Germany (Wachutka, G.)
Abstract	Currently strong efforts are being made to build simulation platforms for the predictive simulation of microelectromechanical devices and microsystems (MEMS) as cost-effective and time-saving alternative to the traditional experimental approach. Already today the rapid progress in microsystems technology is strongly supported by MEMS-specific modeling methodologies and dedicated simulation tools constituting a "virtual laboratory" on the computer, which enables the visualization and detailed analysis of the operating behavior of single microdevices as well as their collaborative function in a microsystem. In this context, one of the most important aspects is the consistent treatment of coupled fields and coupled energy and signal domains required for deriving macromodels of microsystems from the continuous field level. To this end, we discuss practicable methodologies for setting up physically-based consistent microdevice and full system models for the effort-economizing and yet accurate numerical simulation of micro-mechatronical components and systems.
Sponsorship	Japan Soc. Appl. Phys. IEEE Electron Devices Soc. IEICE IEEE EDS Japan Chapter IEEE EDS Kansai Chapter
Starting Page	9
Ending Page	14
File Size	468903
Page Count	6
File Format	PDF
ISBN	4891140275
DOI	10.1109/SISPAD.2002.1034505
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-09-04
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Japan Soc. of Applied Physics
Subject Keyword	Computational modeling Predictive models Microelectromechanical devices Micromechanical devices Analytical models Computer simulation Laboratories Visualization Collaborative tools Numerical simulation
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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