NDLI: T-shaped resonating beam pressure sensor

Content Provider	IEEE Xplore Digital Library
Author	Sujan, Y. Vasuki, B. Uma, G.
Copyright Year	2012
Description	Author affiliation: Department of Instrumentation and Control Engineering, National Institute of Technology, Tiruchirappalli 620 015, India (Sujan, Y.; Vasuki, B.; Uma, G.)
Abstract	A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a T-shaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 μm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz.
Starting Page	271
Ending Page	275
File Size	927230
Page Count	5
File Format	PDF
ISBN	9781467323956
e-ISBN	9781467323963
e-ISBN	9781467323949
DOI	10.1109/SMElec.2012.6417139
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-09-19
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Sensitivity Strain Cavity resonators Solid modeling Sensors Micromechanical devices Surface micromachining T-shaped beam Pressure sensor MEMS
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Piezoelectric MEMS resonant gas sensor for defence applications

Analytical modeling of mass-sensitive gas sensor based on MEMS resonator

Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors

Polymer micromachining based on Cu On Polyimide substrate and its application to flexible MEMS sensor

Capacitive monitoring of electrostatic MEMS tunable evanescent-mode cavity resonators

First resonance frequency and high sensitivity for MEMS acoustic sensors

Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor

Solid state RF MEMS resonators in standard CMOS

Influence of technological parameters on the dynamic behavior of a MEMS accelerometer

T-shaped resonating beam pressure sensor

Similar Documents

Piezoelectric MEMS resonant gas sensor for defence applications

Analytical modeling of mass-sensitive gas sensor based on MEMS resonator

Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors

Polymer micromachining based on Cu On Polyimide substrate and its application to flexible MEMS sensor

Capacitive monitoring of electrostatic MEMS tunable evanescent-mode cavity resonators

First resonance frequency and high sensitivity for MEMS acoustic sensors

Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor

Solid state RF MEMS resonators in standard CMOS

Influence of technological parameters on the dynamic behavior of a MEMS accelerometer

T-shaped resonating beam pressure sensor