NDLI: Fabrication of embedded media by etching of self-assembled mask

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2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO)

14th IEEE International Conference on Nanotechnology

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)

2011 11th IEEE International Conference on Nanotechnology

10th IEEE International Conference on Nanotechnology

2009 9th IEEE Conference on Nanotechnology (IEEE-NANO)

2008 8th IEEE Conference on Nanotechnology

2007 7th IEEE Conference on Nanotechnology (IEEE NANO)

2006 Sixth IEEE Conference on Nanotechnology

5th IEEE Conference on Nanotechnology, 2005.

4th IEEE Conference on Nanotechnology, 2004.

2004 4th IEEE Conference on Nanotechnology (IEEE Cat. No.04TH8757)

Table of contents

Carbon nanotubes - Tutorial 1

Nanoelectronies - Tutorial 2

Molecular electronics - Tutorial 3

Bioelectronies - Tutorial 4

Benchmarking nanotechnology for high-performance and low-power logic transistor applications

Carbon nanotube based high current transistors

Simulation of carbon nanotube field-effect devices

Deposition and STM investigation of single-walled carbon nanotubes on GaAs(110)

Two-color size-tunable (1100-1600 nm) quantum dot nanocrystal electroluminescent devices

Thermal conductivity of Si/Ge quantum dot superlattices

Characterization approaches of nanoscale modified plastics

Highly thermal robust Ni-germanosilicide utilizing NiPt/Co/TiN tri-layer for CMOS application

Nanoscale materials modification via low-energy reactive plasmas

Carbon nanotube-tipped microcantilever arrays for imaging, testing, and 3D nanomanipulation: design and control

Dynamic modes of nanoparticle motion during nanoprobe-based manipulation

Nonlinear dynamics of a microcantilever in close proximity to a surface

Perspective of nanotube sensors and nanotube actuators

STTM-promising nanoelectronic DRAM device

Fabrication of single-electron transistors based on proximity effects of electron-beam lithography

Defect characterization and yield analysis of array-based nanoarchitecture

Triple high /spl kappa/ stacks (Al/sub 2/O/sub 3//HfO/sub 2//Al/sub 2/O/sub 3/) with high pressure (10 atm) H/sub 2/ and D/sub 2/ annealing for SONOS type flash memory device applications

Design and simulation of magnetically controlled nanoscale assembly

Dip pen nanolithography/spl trade/ and its potential for nanoelectronics

Fabrication of embedded media by etching of self-assembled mask

Fabrication of magnetic nanostructures using KrF lithography

Scanning tunneling microscopy using dynamic laser heating

Self-assembled monolayer resists for electron beam lithography

A basic architecture for a multistate memory system using nano-antennas

Comparing the transmission through ellipse and double-hole nano-photonic arrays in gold films

Light emission at 1530 nm from mixture of Er/sub 2/O/sub 3/ and P/sub 2/O/sub 5/ nanoparticles on silicon

Quantum confinement observed in ultrafine ZnO and ZnO/Zn/sub 0.8/Mg/sub 0.2/O coaxial nanorod heterostructures

Photonic switching in InAs/InP quantum dots

Coherent transport in SWCNTs with spin-orbit coupling

Ballistic transport in strained-Si cavities: experiment and theory

Very high performance 50 nm T-gate III-V HEMTs enabled by robust nanofabrication technologies

Ballistic GaInAs/AlInAs devices technology and characterization at room temperature

Why is the spin field effect transistor elusive?

Effect of topology on coherent transport through nanotube junctions

High frequency characterization for the single-walled carbon nanotubes using S-parameter

Carbon nanotube-based membranes: a platform for studying nanofluidics

Metalloprotein-based field-effect transistor: a prototype

Theoretical investigation of metal-molecule interface with terminal group

Schottky barrier behavior of metallic multi-wall carbon nanotube-on-metal systems

Transport and electrostatics in metallic carbon nanotubes

Measurement of I-V characteristic of organic molecules using step junction

Conductance investigations of stretched molecules

Conductance modulation in molecular devices via field-induced conformational change

Transistor effects and in situ STM of redox molecules at room temperature

Application of mesoscopic magnetic rings for logic devices

Spin polarized electrodes for organic light emitting diodes

Self-assembled silicon nano-bridges as an enabler for nano-sensors

Ultra-small site temperature sensing by carbon nanotube thermal probes

Piezoresistive behaviour of single wall carbon nanotubes

Field emission of telescoping multi-walled carbon nanotubes

Estimation of the transfer function of a microcantilever used in atomic-force microscopy

Ultra-low-power polymer thin film encapsulated carbon nanotube thermal sensors

Cellular nonlinear network based on semiconductor tunneling structure with a self-assembled quantum dot layer

Cellular neural/nonlinear networks using resonant tunneling diode

Dynamic sparing and error correction techniques for fault tolerance in nanoscale memory structures

Carbon nanotubes for quantum-dot cellular automata clocking

Use of an organic template structure for the manipulation of nano-scale objects

Growth of ZnSe nanowires by molecular beam epitaxy

Platinum/erbium disilicide nanowire arrays on Si(001)

Measurements with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine

Fracture mechanical characterization of micro- and nano-filled polymers by a combined experimental and simulative procedure

Long-range ordered self-assembled InAs quantum dots on [110] GaAs grown with molecular beam epitaxy

Ni-P-CNTs nanocomposite film for MEMS applications

Pure metal deposit using multi-walled carbon nanotubes decorated with ruthenium dioxide super-nanoparticles

Nanoimprint - a tool for realizing nano-bio research

Electron beam lithography and liftoff of molecules and DNA rafts

Modelling quantum dots in conventional and annular III-V micro-pillar micro-cavities for single-photon sources

Imprint lithography as a tool for the fabrication of organic-inorganic vertical microcavities

Robustness of readout devices for Si-based quantum computing

On the modeling of semiconductor quantum effects for circuit simulation

Split current quantum cellular automata: device and logic gates

Optical gain in an interband-resonant-tunneling-diode

Surface modification and bioconjugation of colloidal nanocrystals to form building blocks with molecular recognition

Brownian dynamics: molecular systems modeling and control

Biological applications and biocompatibility of nanocrystals

Nanobiotechnology meets medical technology: prospects and demands

Applications of nanotechnology in medicine

New magnetic FeCo nanoparticles for biotechnology

Drug delivery for nerve tissue regeneration

Localized nucleic acid delivery to living cells using nanobiotechnology approaches

Magnetorelaxometry of magnetic nanoparticles - a new method for the quantitative and specific analysis of biomolecules

Aerosol delivery of DNA-loaded nanoparticles: factors influencing particle stability and gene transfer efficiency

Atomic force microscopy in ophthalmic surgery

Technical and physical aspects of controlling magnetic nanoparticles

Nano-electromechanical transistor operated as a bi-polar current switch

In-situ nanomechanical studies of carbon nanotube bundles

Single molecule detection and macromolecular weighting using an all-carbon-nanotube nanoelectromechanical sensor

Novel buckled shapes of free-standing mesoscopic beams

Inelastic electron tunneling spectroscopy of an alkane SAM

Electronic structure and dielectric behavior of finite-length single-walled carbon nanotubes

Molecular elements on silicon substrates: modeling issues and device prospects

Theoretical research of mixed-valence transition metal complex for molecular computing

Fabrication and electrical characterization of Au/molecule/GaAs devices

Simulation of electrical characteristics of surrounding- and omega-shaped-gate nanowire FinFETs

Nanoscaled double Y-branch junction operating as room temperature RF to DC rectifier

A novel single electron SRAM architecture

Silicon nanocrystals: from Coulomb blockade to memory arrays

Modeling electronic behavior of carbon nanotube junction devices

Microstructure and nanoelectronics of single GaN nanowire with well-defined p-n junction

Interactive DNA sequence and structure design for DNA nanotechnology and DNA computation

Integrated sensor design using ion channels inserted into lipid bilayer membranes

Control and function for DNA nanodevices

Experimental studies of DNA electrical properties using AFM based nano-manipulator

Choice of flat-band voltage, V/sub DD/ and diameter of ambipolar Schottky-barrier carbon nanotube transistors in digital circuit design

Design and performance analysis of a novel nanoscale associative memory

On single electron technology full adders

New complementary logic circuits using coupled quantum wells

A circuit approach for implementing quantum memory

Binary addition based on single electron tunneling devices

Suppression of quantum interference induced vortices and threshold voltage shift due to the inclusion of inelastic scattering in ultra small fully depleted SOI MOSFETs

Quantum mechanical and transport aspects of resolving discrete charges in nano-CMOS device simulation

Three-dimensional simulation of single electron transistors

How quantum effects and unintentional doping affect the threshold voltage of narrow-width SOI devices

The computational abilities of fixed random structures

Power dissipation in nanomagnetic logic devices

Nanomanipulation with 3D visual and force feedback using atomic force microscopes

Augmented reality enhanced "top-down" nano-manufacturing

Haptically generated paths of an AFM-based nanomanipulator using potential fields

The nanostructured Origami/sup TM/ 3D fabrication and assembly process for nanomanufacturing

Compact current and current noise models for single-electron tunneling transistors

Quantum well electron dynamics in a parallel magnetic field

Plasmon resonances in terahertz photoconductivity

Change in electrical characteristics of gallium phosphide nanowire transistors under different environments

Correlation between plasmon absorption and terahertz photoconductance in a grid-gated double-quantum well FET

Fabrication of CaF/sub 2//Si/CaF/sub 2/ resonant-tunneling diodes by B-surfactant enhanced epitaxy of Si quantum-well layers

Microtubules and neuronal nanobioelectronics

Carbon-based nanoelectronics: nanoICs with fullerenes

Semi-empirical SPICE models for carbon nanotube FET logic

Electrical and material characteristics of the sub 5 nm hafnium doped tantalum oxide high k film

SPICE implementation of a compact single electron tunneling transistor model

Quantum simulation of nano-scale Schottky barrier MOSFETs

Regular array of nanometer-scale devices performing logic operations with fault-tolerance capability

The tunneling field effect transistor (TFET) used in a single-event-upset (SEU) insensitive 6 transistor SRAM cell in ultra-low voltage applications

Resonant crossover of terahertz loss to gain in a Bloch oscillating InAs/AlSb super-superlattice

Optoelectromagnetic nanocrystals and microoptoelectromechanical systems

Edge detection at height profiles with nano resolution

Visible frequency of achromatic quadrants wave plates using the artificial birefringence

Light transmission through nanostructured metal films: numerical modeling and experiment

Self-oscillation of micromechanical resonators

Annealed InGaAs quantum dot thin p-clad laser diodes for integration

Quantum-wired MOSFET photodetector fabricated by conventional photolithography on SOI substrate

Dielectrophoretic integration of nanodevices with CMOS circuitry

Visible photoluminescence and conductometric response of tin oxide nanobelts to NO/sub 2/: toward a selective gas sensor

Freely suspended nanostructure with no substrate beneath: fabrication and optical imaging

A biomedical bone nano-transducer

Preparation of thermo-chromic nanocomposite films

Computational estimation of nano-photocatalyst activity: feasibility of kernel based learning machines

On shape controlled nanocrystals and hybrid materials: how nanotransistors and remote controlled fluorescent probes could be realized

Catalytic syntheses of silicon nanowires and silica nanotubes

Improvement in writing speed of electron beam direct-write lithography

Preparation of nano-composites by advanced colloidal processing

Fabrication of nanoelectrodes for hybrid molecular-electronic devices

Self assembly of nanowires array with lattice directional growth

A hybrid nanorobotic manipulation system integrated with nanorobotic manipulators inside scanning and transmission electron microscopes

Automated nano-assembly of nanoscale structures

Atomic force microscope based nanomanipulator for mechanical and optical lithography

Magnetic anisotropy in magnetostatically coupled Ni/sub 80/Fe/sub 20/ nanowires

Three-dimensional calculation of electronic structures in semiconductor quantum ring based artificial molecules

Control of drug-carrying magnetobeads by magnetic gradient-fields

20 nm silicon nanorods fabricated by reactive ion etch

Inversion asymmetry effects in L-valley quantum wells

Quantized conductance in an in-plane gated In/sub 0.53/Ga/sub 0.47/As quantum point contact

Scattering of chiral currents by quantum point contacts

Electrical contacts of metals to carbon-nanotubes for applications to electrical coupling between miniaturized moving parts and sensors

Lattice of surface-magic-clusters: an ordered array of identical nanostructures

Temperature dependence of electron transport through long organic molecules

Resonant electron tunneling through azurin in air and liquid by scanning tunnelling microscopy

A two-level redundancy scheme for enhancing scalability of molecular-based crossbar memories

STM assisted in-situ spectroscopy on nano-sized crystallites of organic semiconductors

Electron-phonon scattering in molecular wires

Device for conductance measurements of molecular systems

Practical aspects of electron transport through single molecules

Effects of synthesis conditions on the growth of MWCNTs using an ultra sonic evaporator with pyrolysis of hydrocarbon (IEEE-NANO paper #6/spl I.bar/1)

Functionalization and dispersion in a polymer-matrix of single-wall carbon nanotubes: a FT-IR study

Carbon nanotubes analysis, classification and characterization

Carbon nanotube/conducting polymer composites for electronic application: materials preparation and devices assembling

Controlled growth of ordered SWCNTs for the realization of multielectrode field emitter devices

Atomistic study of the role of contact properties on nanotube conduction

Controlled growth of carbon nanotubes on microstructured surfaces

Individual single-walled carbon nanotubes with vertical alignment

Electric transport properties of single-walled carbon nanotubes functionalized by plasma ion irradiation method

Multi-physics analysis for assembling of nano particle under the mixture condition of the dielectric fluid and AC electric field

Assembly of carbon nanotubes onto arrays of microfabricated test patterns for the design of nanoelectronic devices

Ultrathin capsules

Robust entropy-enhanced frequency-domain genomic analysis under uncertainties

Quantum theory and high-fidelity mathematical models of DNA

Atomic force microscopy in ophthalmic surgery

Probing lipid membranes and ion channels with high frequency spectroscopy

DNA-mediated assembly of gold nanoparticles influenced by cations

A drug delivery system for the treatment of peripheral nervous system injuries

Yeast cytochrome c on gold electrode: a robust hybrid system for bio-nanodevices

Nanotechnology and medicine

Experimental study of tunnelling through nanogap electrodes in neural networks

Quantum systems versus classical networks

A fault-tolerant architecture for nanoelectronic signal processing

Multiplexing schemes for cost-effective fault-tolerance

Useful logic blocks based on clocked series-connected RTDs

Quantum Boolean circuits construction using tabulation method

Reliability evaluation of von Neumann multiplexing based defect-tolerant majority circuits

Reliability analysis for defect-tolerant nano-architectures in the presence of interconnect noise

Effective electrostatic discharge protection circuit design using novel full-silicided N-MOSFETs in sub-100 nm era

Modeling and analysis of carbon nanotube interconnects and their effectiveness for high speed VLSI design

An efficient functional verification method for quantum Boolean circuits

Design of multi-valued QMOS pre-decoder

Design and analysis of SET circuits: using MATLAB modules and SIMON

Using quantum model of computation for reliability evaluation of defect tolerant nano-architectures

Complex gate implementations for quantum dot cellular automata

On nanoelectronic architectural challenges and solutions

Performance of bulk-heterojunction organic photodetectors

Nanomagnetism and domain structure of sintered nickel-zinc ferrites studied by magnetic force microscopy

Relaxation oscillation simulations and dilute magnetic semiconductor RTDs

Dissipative effects in a DNA ladder model

Construction of an ESR-STM for single molecular based magnets anchored at surfaces

Patterning molecular scale paramagnets at Au surfaces: a root to magneto-molecular-electronics

Aspects of the theory of resonant photoconductivity in a grid-gated double-quantum-well FET in a parallel magnetic field and transport through long organic molecules

Transport and TEM on individual nanotubes and nanotube peapods

Step and flash nanoimprint lithography in Europe

2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003.

Proceedings of the 2nd IEEE Conference on Nanotechnology

Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516)

Fabrication of embedded media by etching of self-assembled mask

Content Provider	IEEE Xplore Digital Library
Author	Verma, L.K. Ng, V.
Copyright Year	2004
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore (Verma, L.K.; Ng, V.)
Abstract	Argon ion etching assisted by CF4 gas using a mask from self assembly of polystyrene spheres was performed on Si(100) substrates. The etch process is calibrated for the spheres to achieve a good etch rate while maintaining the spherical geometry of the PS spheres during etching. Grooves with vertical side walls and depth of 90 nm were successfully formed. Triangular shaped grooves of mean size 110 nm were etched. NiFe was deposited into the grooves in Si substrate to form embedded media. Scanning electron microscopy and magnetic force microscopy are used to study the etching profiles and magnetic domain distribution of dots.
Starting Page	62
Ending Page	64
File Size	345597
Page Count	3
File Format	PDF
ISBN	0780385365
DOI	10.1109/NANO.2004.1392250
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-08-16
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Etching Scanning electron microscopy Fluid flow Magnetic force microscopy Chemicals Magnetic domains Argon Material storage Magnetic forces
Content Type	Text
Resource Type	Article

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