NDLI: The effect of electron assisted RF discharge plasma on the surface propertis of PET film

Content Provider	IEEE Xplore Digital Library
Author	Ying Guo Yanfeng Xie Jianjun Shi Jing Zhang
Copyright Year	2012
Description	Author affiliation: College of Sciences, Donghua University, 2999 North Renmin Road, Shangha, 201620, China (Ying Guo; Yanfeng Xie; Jianjun Shi; Jing Zhang)
Abstract	Summary form only given. Flexible displays, flexible paper related electronic products are important development tendency in micro-electronics industry. At present, increase the adhesive strength between flexible organic substrates and ITO film quickly and efficiently and ensure the reliability of the adhesive between them is a burning question. By pulse modulate technology, we investigated the mechanism and effects of secondary electron assisted RF pulse discharge plasma, and developed a stable and uniform secondary electron assisted RF pulse plasma system which can operate at a wide process window. We did depth research in the effect of discharge power, and Ar/O2 ratio on the concentration of active species and the properties of secondary electron, and explored the relationship between the parameters and surface modification effect. Hydrophilicity of the PET film surfaces was studied by contact angle measurements. Atomic force microscopy (AFM) was used to study the changes in surface feature of the polymer surface due to plasma treatment. The chemical composition of the polymer films was analyzed by X-ray photoelectron spectroscopy (XPS). The adhesion strengths of the Au layers on the plasma-treated PET surfaces were studied by T-peel strength test.
File Size	133327
File Format	PDF
ISBN	9781457721274
ISSN	07309244
e-ISBN	9781457721298
e-ISBN	9781457721281
DOI	10.1109/PLASMA.2012.6383664
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-07-08
Publisher Place	United Kingdom
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface treatment Plasmas Radio frequency Discharges (electric) Surface discharges Positron emission tomography Films
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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