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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Wu, Y. Lidberman, M.A. |
| Copyright Year | 1999 |
| Description | Author affiliation: California Univ., Berkeley, CA, USA (Wu, Y.) |
| Abstract | Summary form only given. A large area inductive plasma source driven by a 13.56 MHz traveling wave has been investigated. Launching a traveling wave eliminates standing wave effects to obtain a uniformly excited processing plasma. The plasma source is rectangular in shape with a processing area of 71 cm-61 cm, and contains a substrate holder large enough to study processing of 300 mm diameter silicon wafers and 360 mm/spl times/465 mm glass substrates. The antenna coil consists of a series (serpentine) connection of eight parallel rods embedded in the plasma inside thin quartz tubes. The antenna coil configuration and the circuit used to launch a traveling wave are described. The plasma properties, including plasma potential, ion density profile, and electron temperature were measured as a function of discharge power (up to 2000 W) and gas pressure (1-100 mTorr), with a capacitive probe and a Langmuir probe. The Langmuir probe is driven by two stepper motors to provide a two-dimensional density profile. Both motor motion and data acquisition and processing are controlled by a computer in real time through a data acquisition board. We find that it is possible to tune the system to launch a traveling wave for a wide range of powers and pressures. |
| File Size | 107839 |
| File Format | |
| ISBN | 0780352246 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1999.829322 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1999-06-24 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Plasma waves Plasma sources Plasma materials processing Plasma properties Plasma measurements Plasma temperature Probes Coils Plasma density Temperature measurement |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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