NDLI: Reliability test and failure analysis of optical MEMS

Content Provider	IEEE Xplore Digital Library
Author	Durr, P. Dauderstadt, U. Kunze, D. Auvert, M. Lakner, H.
Copyright Year	2002
Description	Author affiliation: Fraunhofer-Inst. for Microelectron. Circuits & Syst. (FhG-IMS), Dresden, Germany (Durr, P.; Dauderstadt, U.; Kunze, D.; Auvert, M.; Lakner, H.)
Abstract	Modern UV-lithography is searching for new highly parallel writing concepts. Spatial light modulation (SLM) with optical MEMS devices offers such possibilities. Special emphasis must be put on the ability of SLM devices to handle ultraviolet light (UV). For deep UV laser mask writing (248 nm) we designed and fabricated a 2048/spl times/512 pixel optical MEMS with individually addressable aluminum micro-mirrors. In order to support the small volume production and the qualification of such devices we have set up test and characterization systems for failure analysis and lifetime testing. In order to ensure a high quality of the optical MEMS e.g. a map of the device under test is needed showing the exact position of defective pixels together with the type of defect like not responding, always deflected, wrong spring constant, or poorly reflecting surface. Additionally information on the flatness of the mirrors and on their lifetime under UV pulsed illumination are required. This paper describes the concepts of our test systems, their experimental realization, and results obtained for our optical MEMS chips.
Starting Page	201
Ending Page	206
File Size	1102825
Page Count	6
File Format	PDF
ISBN	0780374169
DOI	10.1109/IPFA.2002.1025660
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-07-12
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Failure analysis Micromechanical devices Optical modulation Optical devices System testing Writing Life testing Microelectromechanical devices Laser modes Optical design
Content Type	Text
Resource Type	Article

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