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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Cole Jr., E.I. Tangyunyong, P. Hawkins, C.F. Bruce, M.R. Bruce, V.J. Ring, R.M. Wan-Loong Chong |
| Copyright Year | 2002 |
| Description | Author affiliation: Sandia Nat. Lab., Albuquerque, NM, USA (Cole, E.I., Jr.; Tangyunyong, P.) |
| Abstract | Resistive interconnection localization (RIL) is a new scanning laser microscope analysis technique that directly and rapidly localizes defective IC vias, contacts, and conductors from the front side and backside. RIL uses a scanned laser to produce localized thermal gradients in IC interconnections during functional testing. A change in the pass/fail state with localized heating of the IC identifies the failing site. The technique reduces the time to locate a resistive via from months to minutes. The sources of defective vias, the physics of RIL signal generation, and examples of RIL analysis are presented. |
| Starting Page | 15 |
| Ending Page | 21 |
| File Size | 1325720 |
| Page Count | 7 |
| File Format | |
| ISBN | 0780374169 |
| DOI | 10.1109/IPFA.2002.1025604 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2002-07-12 |
| Publisher Place | Singapore |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical microscopy Failure analysis Optical imaging Conductors Laser theory Heating Physics Testing Contacts Chemical analysis |
| Content Type | Text |
| Resource Type | Article |
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