NDLI: Improvement of p-i buffer layer properties by hydrogen plasma treatment and its applications to pin a-Si:H solar cells

Content Provider	IEEE Xplore Digital Library
Author	Tanaka, H. Ishiguro, N. Miyashita, T. Yanagawa, N. Sadamoto, M. Koyama, M. Miyachi, K. Ashida, Y. Fukuda, N.
Copyright Year	1993
Description	Author affiliation: Central Res. Inst., Mitsui Toatsu Chem. Inc., Yokohama, Japan (Tanaka, H.; Ishiguro, N.; Miyashita, T.; Yanagawa, N.; Sadamoto, M.; Koyama, M.; Miyachi, K.; Ashida, Y.; Fukuda, N.)
Abstract	The performance of p-i buffer layers in pin amorphous silicon solar cells was improved by a method of alternately repeating deposition and hydrogen plasma treatment (ADHT). The ratio of SiH/sub 2SiH of a-SiC:H films was minimized and the photoconductivity was maximized at a certain treatment time. The optical bandgap of the a-SiC:H film was increased by the hydrogen plasma treatment while the hydrogen contents were almost constant. The ADHT method was also examined for improving the film properties and cell characteristics. The change of performance of the solar cells corresponded to that of a-SiC:H film properties of photoconductivity and the SiH/sub 2SiH ratio against the hydrogen plasma treatment time. The wide optical bandgap and the high photoconductive a-Si:H film without carbon was deposited by the ADHT method. The solar cell conversion efficiency obtained for a-Si:H buffer layer was equal to that with a-SiC:H buffer layer. With the use of the high performance p-i buffer layer deposited by ADHT method, a cell conversion efficiency of 13.2% was obtained.
Starting Page	811
Ending Page	815
File Size	303224
Page Count	5
File Format	PDF
ISBN	0780312201
DOI	10.1109/PVSC.1993.347117
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1993-05-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasma properties Buffer layers Hydrogen Plasma applications Optical films Photovoltaic cells Photoconductivity Optical buffering Plasma chemistry Photonic band gap
Content Type	Text
Resource Type	Article

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