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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Se Jin Ahn Ki Hyun Kim Kyung Hoon Yoon |
| Copyright Year | 2006 |
| Description | Author affiliation: Korea Inst. of Energy Res., Daejeon (Se Jin Ahn; Ki Hyun Kim; Kyung Hoon Yoon) |
| Abstract | The formation characteristics of $MoSe_{2}$ by selenization of Mo and nanoparticle derived $Cu(ln,Ga)Se_{2}(CIGS)/Mo$ layers were investigated with a two-zone RTP (rapid thermal process) furnace to elucidate why the CIGS/Mo layer peels off the glass substrate when selenized under the high Se vapor pressure condition. It was found that the thickness of $MoSe_{2}$ linearly increased with Se evaporation temperature and substrate temperature. At a substrate temperature of 550degC and Se evaporation temperature of 450degC, 1.6mum thick $MoSe_{2}$ layer formed in 5 minutes with an expense of 0.4mum thick Mo. The formation of very thick $MoSe_{2}$ layer revealed that c-axis of hexagonal $MoSe_{2}$ is parallel to the Mo substrate. When the nanoparticle derived CIGS/Mo layers are selenized at a substrate temperature of 500degC and Se evaporation temperature of 450degC for 5 minutes, about 1.3mum thick $MoSe_{2}$ formed at CIGS and Mo interface without significant growth of CIGS particles, demonstrating that reaction rate of Se with Mo is much faster than that with CIGS nanoparticles |
| Sponsorship | IEEE Electron Devices Soc |
| Starting Page | 506 |
| Ending Page | 508 |
| File Size | 1023531 |
| Page Count | 3 |
| File Format | |
| ISBN | 1424400163 |
| DOI | 10.1109/WCPEC.2006.279502 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-05-07 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Substrates Glass Furnaces Rapid thermal processing Nanoparticles Temperature control Costs Spraying Adhesives Heat treatment |
| Content Type | Text |
| Resource Type | Article |
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