NDLI: Effects of pure-hydrogen and pure-argon plasmas on the near-surface type conversion of p-InP

Content Provider	IEEE Xplore Digital Library
Author	Gessert, T.A. Li, X. Flowers, G.E. Beck, E.E. Coutts, T.J.
Copyright Year	1992
Description	Author affiliation: Nat. Renewable Energy Lab., Golden, CO, USA (Gessert, T.A.; Li, X.; Flowers, G.E.; Beck, E.E.; Coutts, T.J.)
Abstract	It is shown that, although similar solar cell junctions are formed via surface type conversion during both Ar- and H/sub 2/-plasma exposures, secondary effects due to the different plasma species can be observed. These include differences in the carrier concentration at the very near surface of the type-converted layer, and also differences in R/sub se/ (emitter sheet resistance), R/sub sh/, J/sub 01/ (reverse saturation current density), n/sub 1/ (diode ideality factor), and quantum efficiency. It is suggested that the predominant mechanism of plasma-induced type conversion, for low-doped p-InP, is ion bombardment, and that this mechanism can be assisted by effects due to H/sub 2/ passivation. Although ion bombardment appears necessary to form the junction, the extent to which this process yields beneficial results is limited to a specific range of process parameters. In order to reduce these limitations, specific effects due to several parameters have been isolated. It is believed that optimized incorporation of these parameters should lead to performance improvements in both the plasma-formed diagnostic devices and the indium tin oxide (ITO)/InP cell.
Starting Page	328
Ending Page	331
File Size	423634
Page Count	4
File Format	PDF
ISBN	0780305221
DOI	10.1109/ICIPRM.1992.235686
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1992-04-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface resistance Indium tin oxide Photovoltaic cells Current density Diodes Plasma density Passivation Lead compounds Plasma devices Plasma diagnostics
Content Type	Text
Resource Type	Article

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