NDLI: A novel InAlAs/InGaAs layer structure for monolithically integrated photoreceiver

Content Provider	IEEE Xplore Digital Library
Author	Hodel, U. Orzati, A. Marso, M. Homan, O. Fox, A. Hart, A.V.D. Forster, A. Kordos, P. Luth, H.
Copyright Year	2000
Description	Author affiliation: Inst. of Thin Film & Ion Technol., Forschungszentrum Julich GmbH, Germany (Hodel, U.)
Abstract	We present a novel InAlAs/InGaAs layer structure for monolithically integrating MSM diodes and HEMTs into an photoreceiver. The novel layer system, grown on semiinsulating InP, consists of a typical HEMT layer sequence with an additional lattice matched InGaAs layer under the 2DEG channel of the HEMT. This additional layer acts as a photoabsorption layer and enables the production of integrated MSM/HEMT circuits without an additional epitaxial or technological step. Our investigations showed a minor influence of a varying absorption layer thickness on the behavior of the HEMT, leading to a 30% decrease in f/sub T/ and f/sub max/. A 300 nm gate length HEMT can be produced with f/sub T/=75 GHz and f/sub max/=105 GHz on a layer sequence with 200 nm absorption layer thickness. The MSM diodes with a finger width and distance of 500 nm show a bandwidth of about 20 GHz and a responsivity of 0.4 A/W on the same system. On the novel layer system, a monolithically integrated photoreceiver, consisting of an MSM diode and a distributed amplifier (two HEMTs) with a response of 0.7 A/W and a bandwidth of 13.5 GHz is presented.
Starting Page	466
Ending Page	469
File Size	356477
Page Count	4
File Format	PDF
ISBN	0780363205
ISSN	10928669
DOI	10.1109/ICIPRM.2000.850334
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-05-14
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Indium compounds Indium gallium arsenide HEMTs MODFETs Diodes Absorption Bandwidth Indium phosphide Lattices Production
Content Type	Text
Resource Type	Article

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