NDLI: On the development of an electrolyte for ECV profiling of AlInAs

Content Provider	IEEE Xplore Digital Library
Author	Udhayasankar, M. Rigo, C. Kumar, J. Ramasamy, P.
Copyright Year	2000
Description	Author affiliation: Crystal Growth Centre, Anna Univ., Madras, India (Udhayasankar, M.)
Abstract	AlInAs layers latticed matched to InP are important for the fabrication of high speed electronic and opto electronic devices. In this work, we present the realisation of three different electrolytes for ECV measurements of AlInAs. A comparison with the behaviours of the different electrolytic solutions has been discussed. Among the new electrolytic solutions, 1HNO/sub 3/:20H/sub 2/O::1HF:25H/sub 2/O and NH/sub 4/F (0.75M) solutions were suitable for ECV profiling of AlInAs. They have low electrolytic resistance and free chemical etch rate values with good Schottky barrier characteristics. They are able to distinguish between n-type and p-type carriers and the variation in their concentration levels in addition to compatibility with the InP substrate material. But during profiling, formation of flakes has been noticed as the junction was approached. ECV estimated carrier concentration values and expected values agree, but the ECV measured thickness values do not agree well with the stylus profiler measured thickness values. Although these electrolytic solutions may be useful in principle for profiling of AlInAs/InP structures, further experiments are required to understand the mechanism of the dissolution of AlInAs thereby completely realising an electrolyte for a successful ECV profiling of AlInAs.
Starting Page	150
Ending Page	153
File Size	487281
Page Count	4
File Format	PDF
ISBN	0780363205
ISSN	10928669
DOI	10.1109/ICIPRM.2000.850254
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-05-14
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Indium phosphide Semiconductor materials Artificial intelligence Conducting materials Optical materials Lattices Schottky barriers Substrates Thickness measurement High speed optical techniques
Content Type	Text
Resource Type	Article

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