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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Fukang Jiang Yong Xu Tianxiang Weng Zhigang Han Yu-Chong Tai Huang, A. Chih-Ming Ho Newbern, S. |
| Copyright Year | 2000 |
| Description | Author affiliation: California Inst. of Technol., Pasadena, CA, USA (Fukang Jiang) |
| Abstract | Packaging for a large distributed sensing system is a challenging topic. Using flexible skin technology solves many of these problems. Combining with the newly developed backside contact technique, sensor packaging is made even easier by completely avoiding the fragile bonding wires. This paper describes the improved flexible MEMS technology and its application to the fabrication and packaging of practical shear stress sensor skins. An airflow separation detection system including these skins, MOSIS bias circuits and a data acquisition unit has been successfully tested in windtunnel and is being used for the aerodynamic study of a MEMS controlled super-maneuverable low-altitude unmanned aerial vehicle (UAV). |
| Starting Page | 364 |
| Ending Page | 369 |
| File Size | 652849 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780352734 |
| ISSN | 10846999 |
| DOI | 10.1109/MEMSYS.2000.838544 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2000-01-27 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Stress Skin Aerodynamics Packaging Micromechanical devices Circuit testing Unmanned aerial vehicles Bonding Wires Fabrication |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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