NDLI: 3D flip-up structure of porous silicon with actuator and optical filter for microspectrometer applications

Content Provider	IEEE Xplore Digital Library
Author	Lammel, G. Renaud, P.
Copyright Year	2000
Description	Author affiliation: Inst. of Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland (Lammel, G.)
Abstract	This paper reports a new fabrication method for a microactuated tunable optical filter based on porous silicon formation followed by electropolishing. This surface micromachining process generates in a single step a multilayered optical interference filter, releases it from the substrate and lifts it out of plane. The filter can be tilted by a thermal bimorph actuator in order to tune the wavelength it transmits or reflects. The fabrication process uses only two photolithography levels on ordinary silicon p/sup +/ substrates. Large, flat, actuatable flip-up Bragg mirrors of porous silicon have been realized with a typical thickness of 30 /spl mu/m and areas ranging from 250 by 750 /spl mu/m to 2400 by 4000 /spl mu/m. Their capability to distinguish light sources with a wavelength separation of less than 20 nm in the visible is presented.
Starting Page	132
Ending Page	137
File Size	524288
Page Count	6
File Format	PDF
ISBN	0780352734
ISSN	10846999
DOI	10.1109/MEMSYS.2000.838503
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-01-27
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Actuators Optical filters Optical device fabrication Optical surface waves Micromachining Interference Lithography Mirrors Light sources
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Single-mask, high aspect ratio, 3D micromachining of bulk titanium

Fabrication of 3D microstructures with inclined/rotated UV lithography

The fabrication of an electrostatic linear actuator by silicon micromachining

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

MEMS 3D optical mirror/scanner

Spatial Light Modulators for Maskless Lithography

Silicon microfilter device fabrication and characterization for diverse microfluidics applications

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Development of a Monolithic PMMA Comb-Drive Micro Actuator Utilizing Hot Embossing and Ultra-Precision Machining

3D flip-up structure of porous silicon with actuator and optical filter for microspectrometer applications

Similar Documents

Single-mask, high aspect ratio, 3D micromachining of bulk titanium

Fabrication of 3D microstructures with inclined/rotated UV lithography

The fabrication of an electrostatic linear actuator by silicon micromachining

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

MEMS 3D optical mirror/scanner

Spatial Light Modulators for Maskless Lithography

Silicon microfilter device fabrication and characterization for diverse microfluidics applications

A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

Development of a Monolithic PMMA Comb-Drive Micro Actuator Utilizing Hot Embossing and Ultra-Precision Machining

3D flip-up structure of porous silicon with actuator and optical filter for microspectrometer applications