NDLI: Implementation of graspless handling system for microparticles using AFM probe

Content Provider	IEEE Xplore Digital Library
Author	Ihn, Y.S. Kim, Y.C. Choi, H.R. Lee, S.M. Koo, J.C.
Copyright Year	2009
Description	Author affiliation: School of Mechanical Engineering, Sungkyunkwan University, Suwon, Korea (Ihn, Y.S.; Kim, Y.C.; Choi, H.R.; Koo, J.C.) \|\| Division of Applied Robot Technology, Korea Institute of Industrial Technology, Ansan, Korea (Lee, S.M.)
Abstract	Physical size of semiconductor components has been reduced and device density has become increased especially during for last years. As a result of this the use of various high precision manipulatable robot systems becomes norm in the industry. Normally the high precision robot system consists of precision staging system, small scale end-effector system, and highly sensitive autonomous sensing system. One of the most popular micromanipulation tasks might be handling of micro-scale objects on a surface. Although many functional aspects and constraints should be considered when the system is constructed, a key concern for the system design is level of dexterity of the manipulator especially when size of the objects to be handled and spatial resolution of the manipulator become smaller than micron or nano scale. And stiction effect has appeared since a micro-contact mechanics phenomena affects more primarily than inertial force in the high precision robot system. Thus a theoretical study has to be developed on a micro-contact mechanics phenomena. In this paper, the organized system is equipped with an omnidirectional accessible manipulation system with a new visual feedback system. Thanks to the enhanced dexterity of the system, in this paper, microparticle stiction problems that could happen to most of small object handling also can be resolved.
Starting Page	1843
Ending Page	1848
File Size	1259689
Page Count	6
File Format	PDF
ISBN	9781424438037
DOI	10.1109/IROS.2009.5354170
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-10-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Probes Robot sensing systems Robot kinematics Service robots Manipulators Atomic force microscopy Force feedback Cameras Production systems Lithography
Content Type	Text
Resource Type	Article

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