NDLI: Feature referenced tip localization in robotic nano manipulation

Content Provider	IEEE Xplore Digital Library
Author	Lianqing Liu Ning Xi Yuechao Wang Zaili Dong
Copyright Year	2009
Description	Author affiliation: State Key Laboratory of Robotics, Chinese Academy of Sciences, Shenyang, Liaoning 110016, China (Lianqing Liu; Yuechao Wang; Zaili Dong) \|\| Department of Electrical and Computer Eng., Michigan State University, East Lansing, MI 48824, USA (Ning Xi)
Abstract	One of the prerequisite conditions for making a successful manipulation is that the relative position between the AFM tip and the objects can be sensed and controlled accurately. While this prerequisite is grandly hampered by the PZT nonlinearity and thermal drift. Although the PZT nonlinearity can be compensated to a certain extent through mounting a position sensor on the PZT scanner, this method leads to a higher system noise and a higher cost. In addition, this method can not handle the positioning error caused by thermal drift due to the lack of sensing ability to the displacement between the AFM tip and the sample stage. This paper propose a newly developed strategy to solve these problems. Its pivotal idea is the tip position is localized based on the sensing information to sample features, not PZT driving voltage or sensor signal. In this way, the positioning error aroused from PZT nonlinearity and thermal drift can be effectively suppressed. Experimental results demonstrate the advantage and effectiveness of the proposed method.
Starting Page	1351
Ending Page	1356
File Size	593883
Page Count	6
File Format	PDF
ISBN	9781424438037
DOI	10.1109/IROS.2009.5353945
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-10-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanobioscience Nanoscale devices Atomic force microscopy Intelligent robots Sensor phenomena and characterization Probes USA Councils Robot sensing systems Control systems Sensor systems Nanoassembly Thermal drift PZT nonlinearity Local scan
Content Type	Text
Resource Type	Article

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