NDLI: CMOS-compatible silicon nanowire based field-effect pH sensor

Content Provider	IEEE Xplore Digital Library
Author	Anran Gao Pengfei Dai Na Lu Tie Li Yuelin Wang
Copyright Year	2012
Description	Author affiliation: State Key Laboratories of Transducer Technology, Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China (Anran Gao; Pengfei Dai; Na Lu; Tie Li; Yuelin Wang)
Abstract	A field effect transistor (FET) sensor for pH detection was developed in this paper based on complementary metal oxide semiconductor (CMOS)-compatible semiconducting nanowires. Optical lithography and anisotropic self-stop etching were employed to guarantee low cost batch production for silicon nanowires. Under environment relevant for sensing experiments, the transfer curves of silicon nanowires (SiNW) FET were studied so as to understand the device sensing performance. With this nanofabricated pH sensor, the change in the hydrogen ion concentration of a solution can be detected by the corresponding change in current. Without surface modification of the nanosensor, its current showed nonlinear pH-dependence and the threshold voltage (Vth) shift of about 4 V has been attained over pH 5.0 to 9.0 ranges. The development of a nanoscale sensor offers the possibility of highly parallel labeling and detection of chemical and biological molecules with selective control of individual array elements in a single integrated chip.
Starting Page	113
Ending Page	116
File Size	431151
Page Count	4
File Format	PDF
ISBN	9781467345880
e-ISBN	9781467345903
e-ISBN	9781467345897
DOI	10.1109/3M-NANO.2012.6472948
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-08-29
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Performance evaluation Semiconductor device measurement Field effect transistors CMOS-compatible SiNW FET Silicon Nanoscale devices Sensors Nanobioscience Nanosensor
Content Type	Text
Resource Type	Article

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