NDLI: Role of electric field distribution in local anodic oxidation

Content Provider	IEEE Xplore Digital Library
Author	Kexiang Hu Qingkang Wang Peihua Wangyang
Copyright Year	2012
Description	Author affiliation: National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication, Technology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University Shanghai, 200240, P.R. China (Kexiang Hu; Qingkang Wang; Peihua Wangyang)
Abstract	Local electric-field-induced anodic oxidation is one of the earliest and most extensively studied techniques in bias-assisted AFM nanolithography. Except the water bridge created between the tip and the sample surface, local anodic oxidation (LAO) process strongly depends on the tip-sample voltage and especially on the electric field distribution under the tip apex center. Once electric field is formed, its distribution and intensity can be modified by changing the tip-sample voltage and separation. The electric field provides the oxidation kinetics of nanoscale electrochemical reaction and controls the spacial resolution of the fabricated structures. In this paper, the s-wave tip quantum model, the influence of the bias voltage and the electric field strength on oxide structures and the theory of electric-field-induced LAO have been analyzed. In addition, dot-array nanogratings, one-dimensional nanogratings and two-dimensional nanogratings are fabricated by using electric-field-induced LAO process with AFM in the ambient atmosphere.
Starting Page	128
Ending Page	133
File Size	1011278
Page Count	6
File Format	PDF
ISBN	9781467345880
e-ISBN	9781467345903
e-ISBN	9781467345897
DOI	10.1109/3M-NANO.2012.6472980
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-08-29
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanofabrication Anodic oxidation Nanoscale electrochemical reaction Predictive models Oxidation Nanoscale devices Nanolithography Electric fields Probes Electric field intensity Surface treatment Nanogratings
Content Type	Text
Resource Type	Article

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