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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shann-Chyi Mou Chi-Hui Sung |
| Copyright Year | 2012 |
| Abstract | In this research, we used the self-designed piezoelectric actuated stage to achieve the nanometer level precise positioning control through the design of the fuzzy controller. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and Lab VIEW software operating in conjunction with a linear encoder. The new consideration of tuning time Ton is used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the stride of the stage increases with time Ton, and the stride of the stage decreases with time Ton. According to the control experiment, the piezoelectric actuator stage would be reached below 1 £gm levels by the fuzzy controller which is designed for this experiment, has been demonstrated. Furthermore, the purpose of control could be achieved by changing the time Ton which has been demonstrated. |
| Starting Page | 771 |
| Ending Page | 776 |
| File Size | 1350024 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781467307673 |
| DOI | 10.1109/IS3C.2012.199 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-06-04 |
| Publisher Place | Taiwan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Piezoelectric actuated stage Stepping distance Piezoelectric actuato Data acquisition Piezoelectric actuators Data acquisition card Nickel Fuzzy controller Voltage control Clocks |
| Content Type | Text |
| Resource Type | Article |
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