NDLI: OES structural feature based fault detection method for plasma etching

Content Provider	IEEE Xplore Digital Library
Author	Lihui Zhao Huangang Wang Wenli Xu
Copyright Year	2012
Description	Author affiliation: Department of Automation, Tsinghua University, Beijing, China (Lihui Zhao; Huangang Wang; Wenli Xu)
Abstract	Optical Emission Spectra (OES) is a widely used signal in plasm etching. In this paper, an OES structural feature based fault detection method is proposed. Firstly, a template of normal OES curves is extracted via non-negative matrix factorization. Then singular points of the curves are detected by local matching based on the template. The magnitude and occurrence time of these singular points form a structural feature vector, which is a quantitative and simplified description of the curve's shape. Lastly, one-class SVM is introduced for generate a fault detection model based on structural feature vectors from normal OES curves. Experiments on an industrial benchmark dataset show that the proposed method is effective.
Starting Page	971
Ending Page	976
File Size	200408
Page Count	6
File Format	PDF
ISBN	9781467301985
e-ISBN	9781467301992
DOI	10.1109/ICSAI.2012.6223171
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-05-19
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Support vector machines One-class SVM Structural Feature Fault detection Benchmark testing Feature extraction Vectors Etching Singular Point Template Matching Plasmas OES
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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