NDLI: Study of ZnO thin film on silicon substrate by sol-gel spin coating method for bio-medical application

Content Provider	IEEE Xplore Digital Library
Author	Foo, K.L. Kashif, M. Hashim, U. Usman Ali, S.M. Willander, M.
Copyright Year	2012
Description	Author affiliation: Nano Biochip Research Group, Institute of Nano Electronic Engineering (INEE), Universiti Malaysia Perlis, 01000 Kangar, Malaysia (Foo, K.L.; Kashif, M.; Hashim, U.) \|\| Deparment of Electronic Engineering, NED University of Engineering and Technology, Karachi-75270, Pakistan (Usman Ali, S.M.) \|\| Department of Science and Technology, Campus Norrköping, Linköping University, SE-60174 Sweden (Willander, M.)
Abstract	Transparent semiconductor ZnO thin films deposited on p-Si (100) substrates with different solvent (Methanol and Ethanol) were obtained by sol-gel method. The coated ZnO films were annealed in furnace at 500°C for 2 hours. The influence of surface morphologies, surface roughness, I-V characteristic, crystallization and optical properties with different solvent was investigated. The structural properties of the annealed ZnO films were examined with AFM and XRD. UV-Vis was employed to study the optical properties of the ZnO thin films and the electrical characteristics were obtained by I-V curve tracer. XRD result shows that all polycrystalline ZnO thin film after annealing have the orientation along the (002) plane. The ZnO thin film deposited with methanol solvent provide better transmittance if compared to the ethanol solvent. The deposited ZnO thin film will further use for bio-molecular detection with the idea of immobilization and hybridization of the DNA on the ZnO thin film.
Starting Page	223
Ending Page	226
File Size	518801
Page Count	4
File Format	PDF
ISBN	9781457719905
e-ISBN	9781457719912
DOI	10.1109/ICoBE.2012.6179009
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-02-27
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Thin films Solvents Ethanol DNA Sol-gel Zinc oxide ZnO Optical films Methanol
Content Type	Text
Resource Type	Article

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