NDLI: Implementation of early monitor by advanced ebeam metrology for charging damage failure mechanism

Content Provider	IEEE Xplore Digital Library
Author	Richter, M. Buttner, D. Schilling, U. Heinelt, T. Worbs, T. Kraiss, T. Erik, W. Seng, S.Y. Siew Kion Chan Hee Shing Chua Keng Chye Yeo Koh, P. Hiang, S.K. Tang
Copyright Year	2011
Description	Author affiliation: Hermkes-Microvision Inc., 1762 Automation Parkway, San Jose, CA 95131, USA (Hiang, S.K.; Tang) \|\| Hermes-Epitek Singapore, 4 Changi North Street 1, Hermes-Epitek Centre, Singapore 498816 (Seng, S.Y.; Siew Kion Chan; Hee Shing Chua; Keng Chye Yeo; Koh, P.) \|\| Infineon Technologies Dresden GmbH, Koenigsbruecker Strasse 180 D-01099, Germany (Richter, M.; Buttner, D.; Schilling, U.; Heinelt, T.; Worbs, T.; Kraiss, T.; Erik, W.)
Abstract	Based on failure analysis data the estimated failure mechanism in capacitor like device structures was created on wafer in Front End of Line. In the study the optimal process step for electron beam inspection (EBI) on Hermes Microvision eScanlite system was identified within various process steps. Finally an electron beam inspection monitor for early warning was established specifically to identify this fail mechanism with ADC (Automated Defect Classification) and statistical process control.
Starting Page	1
Ending Page	5
File Size	1356928
Page Count	5
File Format	PDF
ISBN	9781457704314
e-ISBN	9781457704307
DOI	10.1109/SCD.2011.6068690
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-09-27
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	ADC Defect density Statistical process control Hermes Microvision Inspection monitor Capacitors HMI Voltage contrast SPC Inspection Electrical fail mechanism Front end of line Automatic defect classification Electron beams EScanlite Failure analysis Tungsten Inspection system Logic gates FA FEOL Electrical defects Monitoring Charging damage
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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