NDLI: Design, analysis, and modelling of a MEMS capacitive microphone for integration into CMOS circuits

Content Provider	IEEE Xplore Digital Library
Author	Ahmadnejad, J. Ganji, B.A. Nemati, A.
Copyright Year	2013
Description	Author affiliation: Electr. & Comput. Eng. Dept., Babol Noshirvani Univ. of Technol., Babol, Iran (Ahmadnejad, J.; Ganji, B.A.; Nemati, A.)
Abstract	A MEMS capacitive microphone with high mechanical sensitivity is presented. The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 $mm^{2}$ dimension, and an air gap of 1.0 μm. Using the results from analysis and simulation, important features of MEMS capacitive microphone such as pull-in voltage, sensitivity and resonance frequency are respectively obtained as 3.8v, -43dbv/Pa, and 74 kHz. A model for this MEMS capacitive microphone is provided by using the relationship between capacitance of microphone and exerted pressure of acoustic wave. To study the accuracy of model, it is simulated in an RC circuit. The results from the simulations show that the proposed model has similar functions as a variable capacitor structure. Simulations show that voltage signal in steady state operates according to exerted pressure and has swing around the bias point of microphone (2.3 V).
Sponsorship	IEEE Circuits Syst. Soc.
Starting Page	186
Ending Page	190
File Size	488280
Page Count	5
File Format	PDF
e-ISBN	9781479927517
DOI	10.1109/PrimeAsia.2013.6731202
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-12-19
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Mechanical sensivity CMOS circuit Capacitive microphone Micro electromechanichal system (MEMS) Microphones Micromechanical devices Semiconductor device modeling Sensitivity Pull-in voltage Resonant frequency Resonance frequency Capacitance Integrated circuit modeling
Content Type	Text
Resource Type	Article

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