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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Liu Fengli Hao Yongping |
| Copyright Year | 2009 |
| Description | Author affiliation: R&D Center of CAD/CAM Technology, Shenyang Ligong University, China (Liu Fengli; Hao Yongping) |
| Abstract | The comb driver was designed and optimized to meet the requirement of enough displacement under lower drive voltage. Device displacement could reach 11um under 30V drive voltage. For comb drive is an inherently unstable system stability analysis about electrostatic spring softing ensure its system stiffness. The inclined comb finger is one main factor to cause its failure. The critical displacement of the comb finger was analyzed. |
| Starting Page | 436 |
| Ending Page | 439 |
| File Size | 1150199 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424446681 |
| DOI | 10.1109/PRIMEASIA.2009.5397362 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-01-19 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Electrodes CADCAM Computer aided manufacturing Fingers Resonant frequency Electrostatic analysis Drives Electrostatic actuators Research and development |
| Content Type | Text |
| Resource Type | Article |
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