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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kano, I. Kano, Y. Nishina, T. |
| Copyright Year | 2008 |
| Description | Author affiliation: Networking & Comput. Service Center, Yamagata Univ., Yonezawa (Kano, I.) |
| Abstract | An experimental investigation was conducted to develop an electrohydrodynamic (EHD) pump based on a microelectromechanical system (MEMS) technology. To develop an EHD micropump with enhanced pumping performance, including not only long-term driving but high-pressure generation, two electrode plates were prepared. On one, the electrode pattern was designed as a series of planar comb fingers. The electrodes had a width of 60 mum, with a 120-mum gap between each pair. The gap between the electrode pairs is 480 mum. The other electrode plate was a non-patterned plane surface. The working fluid was confined between the two electrodes, which faced each other with a distance of 100 mum. The overall dimensions of the micropump were 30 times 30 times 5.3 mm. The working fluid used was HFE-7100 (3 M), and all the experiments were conducted inside a class 1000 clean room with controlled moisture content (19.0%) and temperature (295.55 plusmn 0.5 K). The pump generated a maximum pressure of 500 Pa and a maximum flow rate of 6 mL/min. The highest pump performance was 0.25%. Finally, we proposed an EHD pumping mechanism that explains the pressure generation as the emission of positively charged liquid molecules through the hetero-charge layers. |
| Starting Page | 1 |
| Ending Page | 7 |
| File Size | 629580 |
| Page Count | 7 |
| File Format | |
| ISBN | 9781424422784 |
| ISSN | 01972618 |
| DOI | 10.1109/08IAS.2008.94 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-10-05 |
| Publisher Place | Canada |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Electrodes Microelectromechanical systems Micromechanical devices Fluid flow control Moisture control Pumps Fingers Micropumps Pressure control Electrohydrodynamics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Industrial and Manufacturing Engineering Control and Systems Engineering Electrical and Electronic Engineering |
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