NDLI: Recent Development of Using Optical Methods to Measure the Mechanical Properties of Thin Films

Content Provider	IEEE Xplore Digital Library
Author	Chi-Jia Tong Ming-Tzer Lin Chung Lin Wu Ya-Chi Cheng
Copyright Year	2014
Description	Author affiliation: Nat. Meas. Lab., ITRI, Hsinchu, Taiwan (Chung Lin Wu; Ya-Chi Cheng) \|\| Inst. of Precision Eng., Nat. Chung Hsing Univ., Taichung, Taiwan (Chi-Jia Tong; Ming-Tzer Lin)
Abstract	The mechanical properties of micron and nanometer scale thin films have become an important issues in modern microelectronics. Here, two recent development of using optical methods to measure the mechanical properties of thin films were introduced. First, a paddle-like cantilever beam test structure with nanometer scale metal films on top was design and developed. Film strain and stresses of different thicknesses were measured through the beam deflection obtained by using a four-step phase-shifting process with a Michelson interferometer. Second, we introduce the XRD measurements of the bulge tested thin film. We annealed thin Ag films and tracked the texture transformation in-situ using synchrotron x-ray diffraction while independently varying the stress in the film using a bulge test apparatus. The bulge height was measured as a function of pressure using a simple Fabry-Perot optical interferometer, using the bulge as the fully reflective surface, and an optically flat half-silvered mirror as a reference surface. A CCD camera was used to record interference fringe motion as the pressure was increased. The bulge height was obtained by counting the number of fringes that passed a given point. A laser light source with a 532 nm wavelength gave a height resolution of 266 nm.
Starting Page	91
Ending Page	94
File Size	313839
Page Count	4
File Format	PDF
ISBN	9781467367523
DOI	10.1109/ISOT.2014.29
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-11-05
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	The mechanical properties of thin films measurement Optical interferometry Films Measurement by laser beam Optical variables measurement Structural beams Laser beams Optical methods Stress
Content Type	Text
Resource Type	Article

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