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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Udrea, F. Maeng, S. Gardner, J.W. Park, J. Haque, M.S. Ali, S.Z. Choi, Y. Guha, P.K. Vieira, S.M.C. Kim, H.Y. Kim, S.H. Kim, K.C. Moon, S.E. Park, K.H. Milne, W.I. Oh, S.Y. |
| Copyright Year | 2007 |
| Description | Author affiliation: Univ. of Cambridge, Cambridge (Udrea, F.) |
| Abstract | In this paper we propose a new type of solid-state gas sensor by combining three recent advances, namely silicon-on-insulator CMOS technology, through wafer etching and growth of gas-sensitive carbon nanotubes. We have developed novel tungsten-based CMOS micro-hotplates that offer ultra low power consumption (less than 10 mW at 250degC), on-chip CNT deposition at temperatures up to 700degC, and full integration of CMOS circuitry. Moreover, the tungsten micro-hotplates possess better stability than other CMOS materials such as polysilicon. The multi-walled CNT resistive gas sensors showed a good response to PPB levels of $NO_{2}$ in air but required additional heating to provide reasonable baseline recovery times. We believe that our approach is attractive for the mass production of low-cost, low-power gas sensors in silicon foundries. |
| Starting Page | 831 |
| Ending Page | 834 |
| File Size | 4448626 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424415076 |
| DOI | 10.1109/IEDM.2007.4419077 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-12-10 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | CMOS technology Micromachining Silicon on insulator technology Gas detectors Solid state circuits Etching Carbon nanotubes Energy consumption Temperature sensors Tungsten |
| Content Type | Text |
| Resource Type | Article |
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