NDLI: Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer

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Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer

Content Provider	IEEE Xplore Digital Library
Author	Petry, J. Singanamalla, R. Xiong, K. Ravit, C. Simoen, E. O'Connor, R. Veloso, A. Adelmann, C. Van Elshocht, S. Paraschiv, V. Brus, S. Van Berkum, J. Kubicek, S. De Meyer, K. Biesemans, S. Hooker, J.C.
Copyright Year	2007
Description	Author affiliation: NXP, Leuven (Petry, J.; Xiong, K.; Ravit, C.; Hooker, J.C.)
Abstract	Abstract MoON has been reported to be a good PMOS candidate. In this paper, we report tuning of the MoON PMOS metal towards Si conduction band-edge with $V_{tau}$ as low as 0.35V for SiON capped with DyO, using a standard high temperature gate first process flow. Consistent shifts of 450 mV in $V_{FB}$ and $V_{tau}$ are observed by capping SiON with DyO for MoON gate. Gate leakage as low as $10^{-7}$ $A/cm^{2}$ at 17.6A EOT is obtained, outperforming HfSiON by 3 orders of magnitude. Intermixing of SiON and DyO is shown to be the key element leading to low EOT and low gate leakage without any degradation of the gate oxide integrity.
Starting Page	329
Ending Page	332
File Size	3780408
Page Count	4
File Format	PDF
ISBN	9781424415076
DOI	10.1109/IEDM.2007.4418938
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	MOS devices Moon Dielectrics Atherosclerosis Electrodes Gate leakage Hafnium Atomic layer deposition Tin Annealing
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in