NDLI: New techniques for elimination of the bird's head and bird's beak

Content Provider	IEEE Xplore Digital Library
Author	Burton, G. Tuntasood, P. Chien, F. Kovacs, R. Vora, M.
Copyright Year	1984
Description	Author affiliation: Fairchild Research Center, Palo Alto, CA (Burton, G.)
Abstract	This paper introduces new techniques for the elimination of the infamous bird's head and bird's beak which result from the recessed Isoplanar technology. The first technique to be described is intended only for "scalping" the bird's head. The process utilizes a phosphogermanosilicate glass as a planarizing medium and a novel wet etching process for transferring the planarized surface into the protruding bird's head. The second technique to be described precludes the formation of a bird's beak in addition to removing the birds head structure. In this method, a polysilicon spacer is formed along the sidewall of the silicon island by LPCVD of poly and plasma etchback. The sidewall poly layer prevents oxygen penetration to the pad oxide during field oxidation, thereby eliminating the formation of a bird's beak.
Starting Page	582
Ending Page	585
File Size	1146233
Page Count	4
File Format	PDF
DOI	10.1109/IEDM.1984.190787
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1984-12-09
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic heads Glass Wet etching Silicon Planarization Hafnium Dry etching Surface resistance Surface cleaning Birds
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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