NDLI: The effect of <100> orientation of fabrication on high-density, high-speed monolithic circuits

Content Provider	IEEE Xplore Digital Library
Author	Collins, R.H. Grochowski, E.G. Hess, M.S. Maheras, G. North, W.D.
Copyright Year	1967
Description	Author affiliation: IBM East Fishkill Facility, Hopewell Junction, N. Y. (Collins, R.H.)
Abstract	Electrical and material limitations in the fabrication of monolithic circuits can be directly attributed to theg orientation commonly used for silicon substate material. It has been found that the orientation provides significant improvements in material perfection and accompanying increased junction breakdown voltage and device beta. Epitaxial film growth is dependent on crystallographic characteristics of the starting substrate. substrates receiving a pre-epitaxial oxidation and diffusion have exhibited a high imperfection density which yields as high as $50,000/cm^{2}stacking$ faults after film growth. These have been reduced by orders of magnitude by using 100 substrates. A direct consequence of this would be higher monolithic circuit yields. Also, the slow growing orientation exhibits a horizontal mode of growth which can be greater than the vertical epitaxial thickness. This could yield significant errors in diffusion mask alignment with respect to sites fabricated prior to deposition. 100 material virtually eliminates this effect, allowing the design of more densely packed circuits.
Starting Page	146
Ending Page	148
File Size	193953
Page Count	3
File Format	PDF
DOI	10.1109/IEDM.1967.187908
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1967-10-18
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication High speed optical techniques Optical filters Lenses Integrated optics Optical design techniques Image generation Application specific integrated circuits Photonic integrated circuits Crystalline materials
Content Type	Text
Resource Type	Article

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