NDLI: Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Content Provider	IEEE Xplore Digital Library
Author	Muralt, P. Ledermann, N. Paborowski, J. Barzegar, A. Gentil, S. Belgacem, B. Petitgrand, S. Bosseboeuf, A. Setter, N.
Copyright Year	1986
Abstract	This paper describes fabrication arid characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-/spl mu/m-thick Pb(Zr/sub 0.53/Ti/sub 0.47/O/sub 3/) (PZT) thin films. The applied structures are circular plates held at four bridges, thus partially undamped. A simple analytical model for the fully clamped structure is used as a reference to optimize design parameters such as thickness relations and electrodes, and to provide approximate predictions for coupling coefficients related to previously determined thin film properties. The best coupling coefficient was achieved with a 270-/spl mu/m plate and amounted to k/sup 2/=5.3%. This value compares well with the calculated value based on measured small signal dielectric (/spl epsi/=1050) and piezoelectric (/spl epsi//sub 31,f/=15 Cm/sup -2/) properties of the PZT thin film at 100 kV/cm dc bias. The resonances show relatively large Q-factors, which can be partially explained by the small diameters as compared to the sound wavelength in air and in the test liquid (Fluorinert 77). A transmit-receive experiment with two quasiidentical pMUTs was performed showing significant signal transmission up to a distance of 20 cm in air and 2 cm in the test liquid.
Page Count	13
File Size	1870293
Starting Page	2276
Ending Page	2288
File Format	PDF
ISSN	08853010
Volume Number	52
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic transducers Piezoelectric films Dielectric thin films Fabrication Bridges Analytical models Design optimization Electrodes Dielectric measurements Resonance
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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