NDLI: A Micromachined Piezoelectric Ultrasonic Transducer Operating in <formula formulatype=inline><tex>${rm d}_{33}$</tex></formula> Mode Using Square Interdigital Electrodes

Content Provider	IEEE Xplore Digital Library
Author	Chao Wang Zheyao Wang Tian-Ling Ren Yiping Zhu Yi Yang Xiaoming Wu Haining Wang Huajun Fang Litian Liu
Copyright Year	2001
Abstract	This paper presents the design, fabrication, and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT) operating in d₃₃ mode. A piezoelectric PZT thin film is polarized along the in-plane direction using top square interdigital electrodes (IDEs), and the in-plane polarization and IDEs enable the pMUT to operate in d₃₃ mode, which allows the PZT to convert the ultrasonic pressure-induced in-plane stresses into in-plane direction charges. The square IDEs fully exploit the stresses of the diaphragm to improve sensitivity and increase device capacitance, and the pMUT is optimized by varying the IDE dimensions rather than the thickness of the PZT film. Theoretical and finite-element analyses are performed to optimize the diaphragm and the IDE dimensions in terms of resonance frequency and sensitivity, respectively. The ultrasonic directivity of the pMUTs with different packaging configurations is characterized, showing large ultrasound inlet areas beneficial to ultrasonic applications requiring high directivity.
Sponsorship	IEEE Sensors Council
Starting Page	967
Ending Page	976
Page Count	10
File Size	1646963
File Format	PDF
ISSN	1530437X
Volume Number	7
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-07-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic transducers Piezoelectric polarization Stress Fabrication Piezoelectric films Electrodes Capacitance Finite element methods Performance analysis Resonance ultrasonic transducer Directivity d $_{33}$ mode interdigital electrode (IDE) in-plane polarization PZT
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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