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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kurita, M. Tsuchiyama, R. Tokuyama, M. Junguo Xu Yoshimura, Y. Kohira, H. Lizhi Su Kato, K. |
| Copyright Year | 1965 |
| Abstract | The current design of magnetic disk head sliders needs two extra margins in flying height design: one for manufacturing tolerance and one for environmental variations. To reduce these margins, we have developed an adjustable flying height slider. This slider carries a piezoelectric microactuator and its flying height can be controlled. After simulating the piezoelectric deflection and flying characteristics, we designed an air-bearing surface for the slider and fabricated it by silicon microelectromechanical systems processing. Several of the fabrication problems previously reported were solved, and the slider's change in the flying height as an electric voltage was applied to the microactuator was optically observed. The observed stroke of this flying height adjustment, 6 nm/15 V, was less than the simulated stroke because of contact between the head and the disk, but it is still large enough to reduce the two current flying-height margins. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 2480 |
| Ending Page | 2482 |
| Page Count | 3 |
| File Size | 896887 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 39 |
| Issue Number | 5 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-09-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Magnetic heads Microactuators Silicon Actuators Microelectromechanical systems Manufacturing Voltage Micromechanical devices Optical device fabrication |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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