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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hyun Tae Kim Sang Joo Kim Suk Hee Han Hi Jung Kim Il Koo Kang |
| Copyright Year | 1965 |
| Abstract | Multilayer thin films of Permalloy with SiO/sub 2/, Si/sub 3/N/sub 4/, Al/sub 2/O/sub 3/, or AlN as a ceramic intermediate layer were prepared by rf magnetron sputtering. The effects of intermediate layer materials on the soft magnetic properties, internal stress, and microstructure of multilayer thin films with various Permalloy thickness were investigated. Effective permeability /spl mu//sub eff/, coercive force H/sub c/, and internal stress /spl sigma/ of multilayers with a fixed intermediate layer (20 /spl Aring/), and a thickness of the permalloy layer, varying from 200 to 5000 /spl Aring/ (number of magnetic layers from 50 down to 2) were measured. Multilayered structures with ceramic intermediate layer thickness of 20 /spl Aring/ and Permalloy layer thickness of less than 500 /spl Aring/ had the lowest coercive force and the highest effective permeability. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 4100 |
| Ending Page | 4102 |
| Page Count | 3 |
| File Size | 284956 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 31 |
| Issue Number | 6 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-11-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Magnetic properties Magnetic films Magnetic multilayers Sputtering Soft magnetic materials Ceramics Magnetic materials Internal stresses Permeability Coercive force |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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