NDLI: Thin-Film Piezoelectric MEMS Transducer Suitable for Middle-Ear Audio Prostheses

Content Provider	IEEE Xplore Digital Library
Author	Campanella, H. Camargo, C.J. Lopez Garcia, J. Daza, A. Urquiza, R. Esteve, J.
Copyright Year	1992
Abstract	We report a thin-film piezoelectric microelectromechanical systems (MEMS) transducer suitable for in vivo implantation as audio prosthesis and a method for fabricating it. The transducer consists of a layered stack of thin films comprising a MEMS membrane made of an isolating oxide interface; two platinum (Pt) layers acting as electrodes, electrical paths, and contacting pads; a thin-film sputtered aluminum nitride (AlN) layer acting as acoustic active material of the transducer; a passivation layer for device protection; and a 3-D micromachined acoustic cavity fabricated on the bulk of a silicon-on-insulator supporting substrate. The transducer has a reduced size and a low cost associated with CMOS-like mass production. Finite-element modeling and experimental tests conducted at the audio and ultrasonic bands show that the device has the performance required in audio prosthesis applications. The technology offers possibilities for biocompatibility or biocompatible packaging and is integrable to microelectronic circuit technologies.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1452
Ending Page	1463
Page Count	12
File Size	1765305
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transducers Acoustics Electrodes Micromechanical devices Aluminum compounds Substrates Prosthetics Implantable biomedical devices Piezoelectric transducers piezoelectric transducers Aluminum nitride (AlN) devices and transducers implantable audio prostheses microelectromechanical systems (MEMS) transducer
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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